JPS6361142U - - Google Patents
Info
- Publication number
- JPS6361142U JPS6361142U JP15641886U JP15641886U JPS6361142U JP S6361142 U JPS6361142 U JP S6361142U JP 15641886 U JP15641886 U JP 15641886U JP 15641886 U JP15641886 U JP 15641886U JP S6361142 U JPS6361142 U JP S6361142U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- net
- utility
- protection device
- transport path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
図は本考案の一実施例を示す一部破断正面図で
ある。
１……バレル型サセプタ、２……ウエハ、３…
…ザグリ、４……回転割出装置、５……回転テー
ブル、６……ウエハ搬送装置、７……チヤツク、
８……ベース、９……サドル、１０……旋回台、
１１……コラム、１２……搬送ヘツド、１３……
ウエハ保護装置。
The figure is a partially cutaway front view showing an embodiment of the present invention. 1...barrel type susceptor, 2...wafer, 3...
... counterbore, 4 ... rotary indexing device, 5 ... rotary table, 6 ... wafer transfer device, 7 ... chuck,
8...Base, 9...Saddle, 10...Swivel base,
11... Column, 12... Transfer head, 13...
Wafer protection equipment.
Claims (1)
軟な部材で形成されたウエハ受け部材からなるウ
エハ保護装置。 A wafer protection device that is installed below a wafer transport path and consists of a wafer receiving member made of a flexible member such as a net.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15641886U JPS6361142U (en) | 1986-10-13 | 1986-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15641886U JPS6361142U (en) | 1986-10-13 | 1986-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361142U true JPS6361142U (en) | 1988-04-22 |
Family
ID=31078015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15641886U Pending JPS6361142U (en) | 1986-10-13 | 1986-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361142U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013157517A (en) * | 2012-01-31 | 2013-08-15 | Lintec Corp | Sheet adhering device and adhering method |
-
1986
- 1986-10-13 JP JP15641886U patent/JPS6361142U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013157517A (en) * | 2012-01-31 | 2013-08-15 | Lintec Corp | Sheet adhering device and adhering method |
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