JPH01174924U - - Google Patents
Info
- Publication number
- JPH01174924U JPH01174924U JP7219788U JP7219788U JPH01174924U JP H01174924 U JPH01174924 U JP H01174924U JP 7219788 U JP7219788 U JP 7219788U JP 7219788 U JP7219788 U JP 7219788U JP H01174924 U JPH01174924 U JP H01174924U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- collet
- adsorbing
- pellets
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 2
- 239000008188 pellet Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
Description
第１図は本考案の一実施例を示す断面図、第２
図は同拡大断面図、第３図は従来例を示す断面図
、第４図は同拡大断面図である。
１……コレツト本体、２……吸着ノズル、３…
…空気吹出ノズル。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is an enlarged sectional view of the same, FIG. 3 is a sectional view showing a conventional example, and FIG. 4 is an enlarged sectional view of the same. 1... Collet main body, 2... Suction nozzle, 3...
...Air blowing nozzle.
Claims (1)
コレツトにおいて、ペレツト吸着用ノズルの外周
に空気を吹き出すノズルを設けたことを特徴とす
るコレツト。 A collet for use in a pellet mounter for semiconductor manufacturing equipment, characterized in that a nozzle for blowing out air is provided on the outer periphery of a nozzle for adsorbing pellets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7219788U JPH01174924U (en) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7219788U JPH01174924U (en) | 1988-05-31 | 1988-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01174924U true JPH01174924U (en) | 1989-12-13 |
Family
ID=31297371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7219788U Pending JPH01174924U (en) | 1988-05-31 | 1988-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01174924U (en) |
-
1988
- 1988-05-31 JP JP7219788U patent/JPH01174924U/ja active Pending