JPH0249131U - - Google Patents
Info
- Publication number
- JPH0249131U JPH0249131U JP12774188U JP12774188U JPH0249131U JP H0249131 U JPH0249131 U JP H0249131U JP 12774188 U JP12774188 U JP 12774188U JP 12774188 U JP12774188 U JP 12774188U JP H0249131 U JPH0249131 U JP H0249131U
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- semiconductor
- supply means
- semiconductor manufacturing
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
Landscapes
- Die Bonding (AREA)
Description
第１図は本考案の一実施例にかかる半導体製造
装置の一部破断分解斜視図、第２図、第３図はそ
れぞれ第１図の−断面図であり、第２図は半
導体ペレツトの非挟持状態、第３図は半導体ペレ
ツトの挟持状態、第４図は従来の半導体製造装置
の斜視図である。
１……半導体ペレツト、２……チヤツク部、１
ａ……コーナ部、１０……ペレツト供給手段、１
２……ペレツトマウント部。
FIG. 1 is a partially cutaway exploded perspective view of a semiconductor manufacturing apparatus according to an embodiment of the present invention, FIGS. 2 and 3 are cross-sectional views taken from FIG. 1, and FIG. FIG. 3 is a perspective view of a semiconductor pellet in a sandwiched state, and FIG. 4 is a perspective view of a conventional semiconductor manufacturing apparatus. 1...Semiconductor pellet, 2...Chuck part, 1
a... Corner part, 10... Pellet supply means, 1
2...Pellet mount section.
Claims (1)
るペレツト供給手段を有する半導体製造装置にお
いて、 上記ペレツト供給手段を半導体ペレツトの対角
線上のコーナ部を挟持するチヤツク部にて構成し
たことを特徴とする半導体製造装置。[Scope of Claim for Utility Model Registration] A semiconductor manufacturing apparatus having a pellet supply means for supplying semiconductor pellets to a pellet mount part, wherein the pellet supply means is constituted by a chuck part that holds a diagonal corner part of a semiconductor pellet. A semiconductor manufacturing device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12774188U JPH0249131U (en) | 1988-09-29 | 1988-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12774188U JPH0249131U (en) | 1988-09-29 | 1988-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0249131U true JPH0249131U (en) | 1990-04-05 |
Family
ID=31380441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12774188U Pending JPH0249131U (en) | 1988-09-29 | 1988-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249131U (en) |
-
1988
- 1988-09-29 JP JP12774188U patent/JPH0249131U/ja active Pending