JPS6178596U - - Google Patents
Info
- Publication number
- JPS6178596U JPS6178596U JP16473184U JP16473184U JPS6178596U JP S6178596 U JPS6178596 U JP S6178596U JP 16473184 U JP16473184 U JP 16473184U JP 16473184 U JP16473184 U JP 16473184U JP S6178596 U JPS6178596 U JP S6178596U
- Authority
- JP
- Japan
- Prior art keywords
- base
- suction pad
- suction
- outer peripheral
- air passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は従来の吸着装置を示す縦断面図、第２
図は第１図の動作説明図、第３図は本考案の吸着
装置の一実施例を示す分解縦断面図、第４図は同
組み立て縦断面図、第５図は第４図の動作説明図
である。
１……基台、２……中心孔、５……吸着パツト
、５ａ……平担部。
Figure 1 is a longitudinal sectional view showing a conventional adsorption device, Figure 2
The figure is an explanatory view of the operation of Fig. 1, Fig. 3 is an exploded longitudinal sectional view showing an embodiment of the adsorption device of the present invention, Fig. 4 is an assembled longitudinal sectional view of the same, and Fig. 5 is an explanation of the operation of Fig. 4. It is a diagram. 1... Base, 2... Center hole, 5... Adsorption pad, 5a... Flat part.
Claims (1)
よりなる吸着パツトを取り付けてなる吸着装置に
あつて、該吸着パツトは基台から突出する外周部
分において平担部を有してなることを特徴とする
吸着装置。 In a suction device in which a suction pad made of a flexible material is attached to a base having a central hole serving as an air passage, the suction pad has a flat portion on the outer peripheral portion protruding from the base. Characteristic adsorption device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473184U JPS6178596U (en) | 1984-10-31 | 1984-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473184U JPS6178596U (en) | 1984-10-31 | 1984-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178596U true JPS6178596U (en) | 1986-05-26 |
Family
ID=30722595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16473184U Pending JPS6178596U (en) | 1984-10-31 | 1984-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178596U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS645752A (en) * | 1987-06-30 | 1989-01-10 | Tokyo Electron Ltd | Suction arm |
-
1984
- 1984-10-31 JP JP16473184U patent/JPS6178596U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS645752A (en) * | 1987-06-30 | 1989-01-10 | Tokyo Electron Ltd | Suction arm |
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