JPS61136543U - - Google Patents
Info
- Publication number
- JPS61136543U JPS61136543U JP1835785U JP1835785U JPS61136543U JP S61136543 U JPS61136543 U JP S61136543U JP 1835785 U JP1835785 U JP 1835785U JP 1835785 U JP1835785 U JP 1835785U JP S61136543 U JPS61136543 U JP S61136543U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- inclined groove
- wafer carrier
- transfer device
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
Description
第１図はこの考案に係るウエハ移換え装置を示
す正面図、第２図は同じく側断面図、第３図ない
し第１０図は第１図、第２図に示したウエハ移換
え装置の動作説明図、第１１図はウエハキヤリア
にウエハを収納した状態を示す図である。
１……ウエハキヤリア、２……傾斜溝、３……
ウエハ、９……ホルダ、１１……仕切板、１３…
…取付台、１４……傾斜面。
FIG. 1 is a front view showing a wafer transfer device according to this invention, FIG. 2 is a side sectional view, and FIGS. 3 to 10 are operations of the wafer transfer device shown in FIGS. 1 and 2. The explanatory diagram, FIG. 11, is a diagram showing a state in which wafers are stored in the wafer carrier. 1... Wafer carrier, 2... Inclined groove, 3...
Wafer, 9... Holder, 11... Partition plate, 13...
...Mounting base, 14...Slope surface.
Claims (1)
斜溝を有するウエハキヤリアに上記ウエハを移換
える装置において、上記ウエハキヤリアを取付け
たとき上記傾斜溝が上記仕切板と平行になる角度
の傾斜面を有する取付台を具備することを特徴と
するウエハ移換え装置。 In an apparatus for transferring the wafer to a wafer carrier having an inclined groove using a holder that holds the wafer between partition plates, the inclined groove has an inclined surface at an angle parallel to the partition plate when the wafer carrier is attached. A wafer transfer device characterized by comprising a mounting stand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1835785U JPS61136543U (en) | 1985-02-14 | 1985-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1835785U JPS61136543U (en) | 1985-02-14 | 1985-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61136543U true JPS61136543U (en) | 1986-08-25 |
Family
ID=30506918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1835785U Pending JPS61136543U (en) | 1985-02-14 | 1985-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136543U (en) |
-
1985
- 1985-02-14 JP JP1835785U patent/JPS61136543U/ja active Pending
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