JPS61171251U - - Google Patents
Info
- Publication number
- JPS61171251U JPS61171251U JP5345085U JP5345085U JPS61171251U JP S61171251 U JPS61171251 U JP S61171251U JP 5345085 U JP5345085 U JP 5345085U JP 5345085 U JP5345085 U JP 5345085U JP S61171251 U JPS61171251 U JP S61171251U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- holding
- shaped
- fulcrum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図Ａ〜Ｄは本考案に係るウエハキヤリアの
構造を説明する平面図、ａ方向からの正面図、Ｘ
―Ｘ′線における断面図およびｂ方向からの正面
面図、第２図Ａ〜Ｅは平面図、側面図、ａ方向か
らの正面図、Ｘ―Ｘ′線における断面図およびｂ
方向からの正面図、第３図は本考案の実施状態を
示す第１図ＡのＸ―Ｘ′線における断面図である
。
図において、１はＨ形枠体、２は鼎形枠体、４
はウエハ、５はウエハ保持部、６は側壁、７は枠
体、８は支点、９はネジ、１０はストツパ、であ
る。
1A to 1D are plan views explaining the structure of the wafer carrier according to the present invention, a front view from the direction a,
- A cross-sectional view along the X' line and a front view from the b direction; Figures 2 A to E are a plan view, a side view, a front view from the a direction, a cross-sectional view along the
FIG. 3 is a cross-sectional view taken along the line XX' of FIG. 1A showing the implementation state of the present invention. In the figure, 1 is an H-shaped frame, 2 is a hook-shaped frame, and 4
5 is a wafer holding portion, 6 is a side wall, 7 is a frame, 8 is a fulcrum, 9 is a screw, and 10 is a stopper.
Claims (1)
の半導体ウエハ４を保持する鋸歯状のウエハ保持
部５をもち、開口部を上部に備えたウエハキヤリ
アにおいて、一方の側壁６が枠体７に固定される
支点８を中心にして回動可能に設けられているこ
とを特徴とするウエハキヤリア。 In a wafer carrier that has a hook-shaped cross-sectional shape, has sawtooth-shaped wafer holding parts 5 for holding a plurality of semiconductor wafers 4 inside both side walls, and has an opening at the top, one side wall 6 is a frame body. A wafer carrier characterized in that it is rotatably provided around a fulcrum 8 fixed to a wafer carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345085U JPS61171251U (en) | 1985-04-10 | 1985-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345085U JPS61171251U (en) | 1985-04-10 | 1985-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61171251U true JPS61171251U (en) | 1986-10-24 |
Family
ID=30574325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5345085U Pending JPS61171251U (en) | 1985-04-10 | 1985-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61171251U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016124059A (en) * | 2014-12-26 | 2016-07-11 | キヤノンマーケティングジャパン株式会社 | Wire electrical discharge machine and working tank |
-
1985
- 1985-04-10 JP JP5345085U patent/JPS61171251U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016124059A (en) * | 2014-12-26 | 2016-07-11 | キヤノンマーケティングジャパン株式会社 | Wire electrical discharge machine and working tank |