JPH0470748U - - Google Patents
Info
- Publication number
- JPH0470748U JPH0470748U JP11361590U JP11361590U JPH0470748U JP H0470748 U JPH0470748 U JP H0470748U JP 11361590 U JP11361590 U JP 11361590U JP 11361590 U JP11361590 U JP 11361590U JP H0470748 U JPH0470748 U JP H0470748U
- Authority
- JP
- Japan
- Prior art keywords
- container
- detection means
- semiconductor wafer
- wafer storage
- state inside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
〔図１〕実施例−１の断面図である。〔図２〕
実施例−１の斜視図である。〔図３〕実施例−１
の変形例を示す図である。〔図４〕実施例−１の
変形例を示す図である。〔図５〕実施例−１の変
形例を示す図である。〔図６〕実施例−２の断面
図である。〔図７〕半導体ウエハ収納容器の一般
的構成を示す断面図である。〔図８〕従来技術の
問題点を示す図である。
符号の説明、１……容器、２１……検知手段（
湿度計）、２２……検知手段（圧力計）。
[FIG. 1] It is a sectional view of Example-1. [Figure 2]
It is a perspective view of Example-1. [Figure 3] Example-1
It is a figure showing a modification of . [FIG. 4] A diagram showing a modification of Example-1. [FIG. 5] A diagram showing a modification of Example-1. [FIG. 6] It is a sectional view of Example-2. [FIG. 7] A cross-sectional view showing the general configuration of a semiconductor wafer storage container. [FIG. 8] A diagram illustrating problems with the prior art. Explanation of symbols, 1... Container, 21... Detection means (
22...detection means (pressure gauge).
Claims (1)
ハ収納容器において、 該容器には該容器内の状態を検知する検知手段
を設け、該検知手段により容器内の状態をモニタ
可能に構成した半導体ウエハ収納容器。[Scope of Claim for Utility Model Registration] A sealed semiconductor wafer storage container for storing semiconductor wafers, the container is provided with a detection means for detecting the state inside the container, and the state inside the container can be monitored by the detection means. A semiconductor wafer storage container configured as follows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990113615U JP2573205Y2 (en) | 1990-10-30 | 1990-10-30 | Semiconductor wafer storage container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990113615U JP2573205Y2 (en) | 1990-10-30 | 1990-10-30 | Semiconductor wafer storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0470748U true JPH0470748U (en) | 1992-06-23 |
| JP2573205Y2 JP2573205Y2 (en) | 1998-05-28 |
Family
ID=31861221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990113615U Expired - Lifetime JP2573205Y2 (en) | 1990-10-30 | 1990-10-30 | Semiconductor wafer storage container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2573205Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004519391A (en) * | 2001-02-22 | 2004-07-02 | フィリップス エレクトロニクス ノース アメリカ コーポレイション | Judgment method when electrode pad cannot be used by detecting relative humidity |
| JP2004527899A (en) * | 2001-01-10 | 2004-09-09 | エンテグリス カイマン リミテッド | Portable container with internal environmental monitor |
| JP2006234608A (en) * | 2005-02-25 | 2006-09-07 | Sumika Chemical Analysis Service Ltd | Evaluation method of contamination state of space in substrate conveyance container |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58203866A (en) * | 1982-05-24 | 1983-11-28 | フロイント産業株式会社 | Drying preserving vessel |
| JPS5997300A (en) * | 1982-11-27 | 1984-06-05 | Matsushita Electric Ind Co Ltd | Manufacturing device of oscillating sensor |
-
1990
- 1990-10-30 JP JP1990113615U patent/JP2573205Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58203866A (en) * | 1982-05-24 | 1983-11-28 | フロイント産業株式会社 | Drying preserving vessel |
| JPS5997300A (en) * | 1982-11-27 | 1984-06-05 | Matsushita Electric Ind Co Ltd | Manufacturing device of oscillating sensor |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004527899A (en) * | 2001-01-10 | 2004-09-09 | エンテグリス カイマン リミテッド | Portable container with internal environmental monitor |
| JP2004519391A (en) * | 2001-02-22 | 2004-07-02 | フィリップス エレクトロニクス ノース アメリカ コーポレイション | Judgment method when electrode pad cannot be used by detecting relative humidity |
| JP2006234608A (en) * | 2005-02-25 | 2006-09-07 | Sumika Chemical Analysis Service Ltd | Evaluation method of contamination state of space in substrate conveyance container |
| JP4512505B2 (en) * | 2005-02-25 | 2010-07-28 | 株式会社住化分析センター | Method for evaluating the contamination state of the space inside the substrate transfer container |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2573205Y2 (en) | 1998-05-28 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |