JPS6294628U - - Google Patents
Info
- Publication number
- JPS6294628U JPS6294628U JP1985187450U JP18745085U JPS6294628U JP S6294628 U JPS6294628 U JP S6294628U JP 1985187450 U JP1985187450 U JP 1985187450U JP 18745085 U JP18745085 U JP 18745085U JP S6294628 U JPS6294628 U JP S6294628U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- polishing
- wafers
- spiral groove
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000005498 polishing Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Description
第１図イは本考案のフイクスチヤーの平面図、
ロは断面図図、第２図イは従来のフイクスチヤー
の平面図、ロは断面図である。
１……フイクスチヤー、２……ポインター、３
……ウエハース、４……ワツクス、５……螺旋状
溝。
Figure 1A is a plan view of the fixture of the present invention.
2B is a sectional view, FIG. 2A is a plan view of a conventional fixture, and FIG. 2B is a sectional view. 1...Fixture, 2...Pointer, 3
...Wafer, 4...Wax, 5...Spiral groove.
Claims (1)
ウエハースの研摩に使用するフイクスチヤー表面
に螺旋状の溝を有することを特徴とする半導体研
摩装置。 A semiconductor polishing device characterized by having a spiral groove on the surface of a fixture used for polishing semiconductor silicon wafers and compound semiconductor wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985187450U JPS6294628U (en) | 1985-12-05 | 1985-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985187450U JPS6294628U (en) | 1985-12-05 | 1985-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6294628U true JPS6294628U (en) | 1987-06-17 |
Family
ID=31137939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985187450U Pending JPS6294628U (en) | 1985-12-05 | 1985-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294628U (en) |
-
1985
- 1985-12-05 JP JP1985187450U patent/JPS6294628U/ja active Pending