JPS61114839U - - Google Patents
Info
- Publication number
- JPS61114839U JPS61114839U JP19799284U JP19799284U JPS61114839U JP S61114839 U JPS61114839 U JP S61114839U JP 19799284 U JP19799284 U JP 19799284U JP 19799284 U JP19799284 U JP 19799284U JP S61114839 U JPS61114839 U JP S61114839U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- semiconductor
- suctions
- vacuum
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims description 9
- 239000011810 insulating material Substances 0.000 claims 1
Landscapes
- Feeding Of Workpieces (AREA)
Description
第１図はこの考案の一実施例の半導体ウエーハ
用真空チヤツク断面図、第２図は従来の半導体ウ
エーハ用真空チヤツクの断面図である。
１，１０１……真空チヤツク、２……半導体ウ
エーハ保持体、２ａ……半導体ウエーハチヤツク
の凹部、２ｂ……半導体ウエーハチヤツクの取着
部、２ｃ……リング部材、１０３……真空系、１
０３ａ……真空系（の凹部へ）の開口。
FIG. 1 is a sectional view of a vacuum chuck for semiconductor wafers according to an embodiment of this invention, and FIG. 2 is a sectional view of a conventional vacuum chuck for semiconductor wafers. 1 , 101 ...Vacuum chuck, 2...Semiconductor wafer holder, 2a...Recess of semiconductor wafer chuck, 2b...Attachment part of semiconductor wafer chuck, 2c...Ring member, 103...Vacuum system, 1
03a...Opening of (to the recess of) the vacuum system.
Claims (1)
周縁と接してこれを吸引保持する凹部を有し、か
つ少なくとも半導体ウエーハとの接触部が熱絶縁
材でなる半導体ウエーハ保持体を備えた半導体ウ
エーハ用真空チヤツク。 For semiconductor wafers, which is equipped with a semiconductor wafer holder that is connected to a vacuum system on its lower surface and has a concave portion that suctions and holds the periphery of the main surface of the semiconductor wafer, and that at least the contact portion with the semiconductor wafer is made of a heat insulating material. Vacuum chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19799284U JPS61114839U (en) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19799284U JPS61114839U (en) | 1984-12-28 | 1984-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61114839U true JPS61114839U (en) | 1986-07-19 |
Family
ID=30756607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19799284U Pending JPS61114839U (en) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61114839U (en) |
-
1984
- 1984-12-28 JP JP19799284U patent/JPS61114839U/ja active Pending