JPH0317632U - - Google Patents
Info
- Publication number
- JPH0317632U JPH0317632U JP7896689U JP7896689U JPH0317632U JP H0317632 U JPH0317632 U JP H0317632U JP 7896689 U JP7896689 U JP 7896689U JP 7896689 U JP7896689 U JP 7896689U JP H0317632 U JPH0317632 U JP H0317632U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum tweezers
- wafer
- area
- suctioning
- handled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
Description
第１図ａは、本考案の真空ピンセツトを示す上
面図。第１図ｂは、本考案の真空ピンセツトの断
面図。第１図ｃは、本考案の真空ピンセツトでウ
エハーを吸着したところを示す図。第２図ａは、
従来の真空ピンセツトを示す上面図。第２図ｂは
、従来の真空ピンセツトの断面図。第２図ｃは、
従来の真空ピンセツトでウエハーを吸着したとこ
ろを示す図。
１…吸引部、２…接触部、３…取手、４…ウエ
ハー。
FIG. 1a is a top view showing the vacuum tweezers of the present invention. FIG. 1b is a sectional view of the vacuum tweezers of the present invention. FIG. 1c is a diagram showing a wafer being attracted by the vacuum tweezers of the present invention. Figure 2 a is
FIG. 2 is a top view showing a conventional vacuum tweezers. FIG. 2b is a sectional view of a conventional vacuum tweezers. Figure 2c is
A diagram showing a wafer being attracted by conventional vacuum tweezers. 1...Suction part, 2...Contact part, 3...Handle, 4...Wafer.
Claims (1)
１枚ずつ吸引することにより、他のウエハーキヤ
リア等に移し替えを行なうための真空ピンセツト
において、ウエハーを吸引するための穴を少なく
とも２ケ設け、かつウエハーとの接触面積を最大
、取扱うウエハーの面積を越えない程度のものと
することを特徴とする真空ピンセツト。 Vacuum tweezers are used to transfer wafers from one wafer carrier to another by suctioning them one by one. Vacuum tweezers characterized by having a maximum contact area that does not exceed the area of the wafer being handled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7896689U JPH0317632U (en) | 1989-07-04 | 1989-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7896689U JPH0317632U (en) | 1989-07-04 | 1989-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0317632U true JPH0317632U (en) | 1991-02-21 |
Family
ID=31622708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7896689U Pending JPH0317632U (en) | 1989-07-04 | 1989-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317632U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997010024A1 (en) * | 1995-09-12 | 1997-03-20 | Eisen Corporation | Personal ornament for applying magnetism to human body |
-
1989
- 1989-07-04 JP JP7896689U patent/JPH0317632U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997010024A1 (en) * | 1995-09-12 | 1997-03-20 | Eisen Corporation | Personal ornament for applying magnetism to human body |