JPS6384951U - - Google Patents
Info
- Publication number
- JPS6384951U JPS6384951U JP17991186U JP17991186U JPS6384951U JP S6384951 U JPS6384951 U JP S6384951U JP 17991186 U JP17991186 U JP 17991186U JP 17991186 U JP17991186 U JP 17991186U JP S6384951 U JPS6384951 U JP S6384951U
- Authority
- JP
- Japan
- Prior art keywords
- facing
- semiconductor wafer
- support body
- supports
- semicircular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
Description
第１図は本考案の一実施例の半導体ウエーハチ
ヤツクの上面図、第２図は従来の半導体ウエーハ
チヤツクの上面図である。
１……個片支持体、２……ウエーハ支持部、３
……結合シヤフト、４……エアーシリンダ、５…
…吸込管、６……吸込口、７……接続管。
FIG. 1 is a top view of a semiconductor wafer stack according to an embodiment of the present invention, and FIG. 2 is a top view of a conventional semiconductor wafer stack. 1...Individual piece supporter, 2...Wafer supporter, 3
...Connection shaft, 4...Air cylinder, 5...
...Suction pipe, 6...Suction port, 7...Connection pipe.
Claims (1)
支持部を有する個片支持体の一対が、前記半円形
の円弧の内側を互いに向い合せにして組合わされ
、かつ、前記向い合せ間隔が閉じ開き自在とされ
た支持体と、この支持体の外側または下部に設け
られた真空吸込み口を有する吸込管とを含むこと
を特徴とする半導体ウエーハチヤツク。 A pair of individual piece supports each having a semicircular support portion that supports a peripheral portion of a lower surface of a semiconductor wafer are combined with the insides of the semicircular arcs facing each other, and the facing interval is such that the facing distance can be freely closed and opened. 1. A semiconductor wafer chuck, comprising: a support body having a cylindrical shape, and a suction pipe having a vacuum suction port provided on the outside or at the bottom of the support body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17991186U JPS6384951U (en) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17991186U JPS6384951U (en) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384951U true JPS6384951U (en) | 1988-06-03 |
Family
ID=31123392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17991186U Pending JPS6384951U (en) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384951U (en) |
-
1986
- 1986-11-21 JP JP17991186U patent/JPS6384951U/ja active Pending