JPS6196685U - - Google Patents
Info
- Publication number
- JPS6196685U JPS6196685U JP17980184U JP17980184U JPS6196685U JP S6196685 U JPS6196685 U JP S6196685U JP 17980184 U JP17980184 U JP 17980184U JP 17980184 U JP17980184 U JP 17980184U JP S6196685 U JPS6196685 U JP S6196685U
- Authority
- JP
- Japan
- Prior art keywords
- plane
- hand part
- hand
- suction cup
- robot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
Description
第１図１は、本考案のシリコン・ウエハー挾持
用ロボツトのハンド部の平面図、第１図２は第１
図のＡ−Ａ線に沿つて切断して示した断面図、第
２図は使用状態を示す平面図、第３図は、本考案
の装置に勘によりハンドリングするシリコン・ウ
エハーの平面図である。
１…シリコン・ウエハー、１ａ…円弧部、１ｂ
…直線部、２…ハンド部、３…爪、４…挾持部、
５…吸盤、６…ガイド孔、７…操作線。
FIG. 1 is a plan view of the hand portion of the silicon wafer holding robot of the present invention, and FIG.
FIG. 2 is a plan view showing the state of use, and FIG. 3 is a plan view of a silicon wafer that is handled by the device of the present invention by intuition. . 1... Silicon wafer, 1a... Arc part, 1b
...straight line part, 2...hand part, 3...claw, 4...clamping part,
5... Suction cup, 6... Guide hole, 7... Operation line.
Claims (1)
に固定され両端部がガイド孔を介して移動する爪
から成る挾持部と、吸盤とを具備するシリコン・
ウエハー挾持用ロボツトのハンド部。 On the plane of the hand part, there is provided a silicone gripping part comprising claws, a part of which is fixed to the plane of the hand part, and both ends of which are movable through guide holes, and a suction cup.
The hand part of the robot for holding wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17980184U JPS6196685U (en) | 1984-11-27 | 1984-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17980184U JPS6196685U (en) | 1984-11-27 | 1984-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196685U true JPS6196685U (en) | 1986-06-21 |
Family
ID=30737366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17980184U Pending JPS6196685U (en) | 1984-11-27 | 1984-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196685U (en) |
-
1984
- 1984-11-27 JP JP17980184U patent/JPS6196685U/ja active Pending
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