JPS6333632U - - Google Patents
Info
- Publication number
- JPS6333632U JPS6333632U JP12694986U JP12694986U JPS6333632U JP S6333632 U JPS6333632 U JP S6333632U JP 12694986 U JP12694986 U JP 12694986U JP 12694986 U JP12694986 U JP 12694986U JP S6333632 U JPS6333632 U JP S6333632U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- holding claw
- movable holding
- operating
- claw provided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 5
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図はこの考案の一実施例のウエハースハン
ドリング治具の側面図、第２図は第１図の要部拡
大断面図、第３図は第１図の治具で半導体ウエハ
ースを保持した状態の正面図である。第４図は従
来のウエハースハンドリング治具の斜視図、第５
図ないし第８図は他のウエハースハンドリングの
治具の要部斜視図である。
１２……本体、１３……固定保持爪、１４……
可動保持爪、１５……操作部、１９……圧縮ばね
。
Fig. 1 is a side view of a wafer handling jig according to an embodiment of this invention, Fig. 2 is an enlarged sectional view of the main part of Fig. 1, and Fig. 3 is a state in which the jig shown in Fig. 1 holds a semiconductor wafer. FIG. Figure 4 is a perspective view of a conventional wafer handling jig, Figure 5 is a perspective view of a conventional wafer handling jig;
8 through 8 are perspective views of essential parts of other wafer handling jigs. 12...Main body, 13...Fixing holding claw, 14...
Movable holding claw, 15... operating section, 19... compression spring.
Claims (1)
持爪と、前記本体の長さ方向の中途部に設けた可
動保持爪と、この可動保持爪を操作する操作部と
を具備してなるウエハースハンドリング治具。 A wafer comprising a rod-shaped main body, a fixed holding claw provided at one end of the main body, a movable holding claw provided halfway in the length direction of the main body, and an operating part for operating the movable holding claw. Handling jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12694986U JPS6333632U (en) | 1986-08-20 | 1986-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12694986U JPS6333632U (en) | 1986-08-20 | 1986-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6333632U true JPS6333632U (en) | 1988-03-04 |
Family
ID=31021235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12694986U Pending JPS6333632U (en) | 1986-08-20 | 1986-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6333632U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04360774A (en) * | 1991-06-03 | 1992-12-14 | Canon Inc | Sheet material gripper |
-
1986
- 1986-08-20 JP JP12694986U patent/JPS6333632U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04360774A (en) * | 1991-06-03 | 1992-12-14 | Canon Inc | Sheet material gripper |