JPS61112640U - - Google Patents
Info
- Publication number
- JPS61112640U JPS61112640U JP19953684U JP19953684U JPS61112640U JP S61112640 U JPS61112640 U JP S61112640U JP 19953684 U JP19953684 U JP 19953684U JP 19953684 U JP19953684 U JP 19953684U JP S61112640 U JPS61112640 U JP S61112640U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- claw
- transfer device
- light emitting
- claws
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims 4
Description
第1図は、本考案の実施例を示す斜視図、第2
図は、使用状態を示す平面図である。
1,2……爪、3……ウエハ溝、4……センサ
ー穴、5……発光部、6……受光部、7……ウエ
ハボート。
Fig. 1 is a perspective view showing an embodiment of the present invention;
The figure is a plan view showing the state of use. 1, 2...nail, 3...wafer groove, 4...sensor hole, 5...light emitting section, 6...light receiving section, 7...wafer boat.
Claims (1)
溝付爪からなるチヤツクを平行に設け、該チヤツ
クの両方の爪のウエハ溝に対向するセンサー穴を
形成し、該2つのセンサー穴を通る直線上で、か
つ、爪の外側に夫々発光部と受光部を設けたこと
を特徴とするウエハの移し替え装置。 2 発光部と受光部が、爪から離れた位置に設け
られていることを特徴とする実用新案登録請求の
範囲第1項記載のウエハの移し替え装置。[Claims for Utility Model Registration] 1. A chuck consisting of mutually opposing wafer grooved claws is provided in parallel on the upper part of the wafer boat, and a sensor hole is formed opposite to the wafer grooves of both claws of the chuck, A wafer transfer device characterized in that a light emitting part and a light receiving part are provided on a straight line passing through two sensor holes and on the outside of the claw, respectively. 2. The wafer transfer device according to claim 1, wherein the light emitting part and the light receiving part are provided at a position apart from the claw.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19953684U JPS61112640U (en) | 1984-12-26 | 1984-12-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19953684U JPS61112640U (en) | 1984-12-26 | 1984-12-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61112640U true JPS61112640U (en) | 1986-07-16 |
Family
ID=30759550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19953684U Pending JPS61112640U (en) | 1984-12-26 | 1984-12-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61112640U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0425151A (en) * | 1990-05-21 | 1992-01-28 | Canon Inc | Thin plate carrying device |
-
1984
- 1984-12-26 JP JP19953684U patent/JPS61112640U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0425151A (en) * | 1990-05-21 | 1992-01-28 | Canon Inc | Thin plate carrying device |