JPS6196684U - - Google Patents
Info
- Publication number
- JPS6196684U JPS6196684U JP17980084U JP17980084U JPS6196684U JP S6196684 U JPS6196684 U JP S6196684U JP 17980084 U JP17980084 U JP 17980084U JP 17980084 U JP17980084 U JP 17980084U JP S6196684 U JPS6196684 U JP S6196684U
- Authority
- JP
- Japan
- Prior art keywords
- robot
- hand
- silicon wafers
- claw part
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 210000000078 claw Anatomy 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
Description
第１図１は、本考案のシリコン・ウエハー挾持
用ロボツトのハンド部の平面図、第１図２は第１
図のＡ−Ａ線に沿つて切断して示した断面図、第
２図は使用状態を示す平面図、第３図は、本考案
の装置でハンドリングするシリコン・ウエハーの
平面図である。
１…シリコン・ウエハー、１ａ…円弧部、１ｂ
…直線部、１ｃ…側面部、２…ハンド部、３…爪
部、４ａ，４ｂ…挾持部、５…爪、６…吸盤、７
…ネジ、８…長孔。
FIG. 1 is a plan view of the hand portion of the silicon wafer holding robot of the present invention, and FIG.
FIG. 2 is a plan view showing the state of use, and FIG. 3 is a plan view of a silicon wafer handled by the apparatus of the present invention. 1... Silicon wafer, 1a... Arc part, 1b
... Straight line part, 1c... Side part, 2... Hand part, 3... Claw part, 4a, 4b... Clamping part, 5... Claw, 6... Suction cup, 7
...screw, 8...long hole.
Claims (1)
装置におけるハンド部において、ハンド部の平面
上にシリコン・ウエハーの上部円弧部に符合する
形状の爪部と左右の挾持部から成る位置決め用爪
部と吸盤とを具備したことを特徴とするシリコン
・ウエハー挾持用ロボツトのハンド部。 A hand part of a handling device for a robot for silicon wafers is provided with a positioning claw part and a suction cup on the plane of the hand part, which consist of a claw part having a shape that corresponds to the upper arc of the silicon wafer, and left and right gripping parts. A hand portion of a robot for holding silicon wafers, which is characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17980084U JPS6196684U (en) | 1984-11-27 | 1984-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17980084U JPS6196684U (en) | 1984-11-27 | 1984-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196684U true JPS6196684U (en) | 1986-06-21 |
Family
ID=30737365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17980084U Pending JPS6196684U (en) | 1984-11-27 | 1984-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196684U (en) |
-
1984
- 1984-11-27 JP JP17980084U patent/JPS6196684U/ja active Pending