JPS6367242U - - Google Patents
Info
- Publication number
- JPS6367242U JPS6367242U JP16271086U JP16271086U JPS6367242U JP S6367242 U JPS6367242 U JP S6367242U JP 16271086 U JP16271086 U JP 16271086U JP 16271086 U JP16271086 U JP 16271086U JP S6367242 U JPS6367242 U JP S6367242U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- light source
- observation window
- processing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例の概念的断面図であ
る。
１：搬送室、２：処理室、５：観測窓、６：光
源、７：電極。
FIG. 1 is a conceptual cross-sectional view of one embodiment of the present invention. 1: Transfer chamber, 2: Processing chamber, 5: Observation window, 6: Light source, 7: Electrode.
Claims (1)
において、真空室の壁の観測窓以外の位置に光源
を備えることを特徴とする半導体製造装置。 1. A semiconductor manufacturing apparatus for processing a semiconductor element in a vacuum chamber, characterized in that a light source is provided at a position other than an observation window on a wall of the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16271086U JPS6367242U (en) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16271086U JPS6367242U (en) | 1986-10-23 | 1986-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367242U true JPS6367242U (en) | 1988-05-06 |
Family
ID=31090234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16271086U Pending JPS6367242U (en) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367242U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0252425A (en) * | 1988-08-16 | 1990-02-22 | Tel Sagami Ltd | Treatment apparatus |
-
1986
- 1986-10-23 JP JP16271086U patent/JPS6367242U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0252425A (en) * | 1988-08-16 | 1990-02-22 | Tel Sagami Ltd | Treatment apparatus |