JPS6295712U - - Google Patents
Info
- Publication number
- JPS6295712U JPS6295712U JP18713885U JP18713885U JPS6295712U JP S6295712 U JPS6295712 U JP S6295712U JP 18713885 U JP18713885 U JP 18713885U JP 18713885 U JP18713885 U JP 18713885U JP S6295712 U JPS6295712 U JP S6295712U
- Authority
- JP
- Japan
- Prior art keywords
- hood
- manufacturing equipment
- semiconductor manufacturing
- blower fan
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 3
- 230000032258 transport Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Warehouses Or Storage Devices (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Cleaning In General (AREA)
- Prevention Of Fouling (AREA)
Description
第１図は、本考案の清浄装置を示す概略図、第
２図は、清浄装置の他の実施例を示す概略図、
尚図中、１は半導体製造設備、２は載台、３は
ベルトコンベアー、４は搬送装置、５はフード、
６は送風フアン、７はフイルター、８は昇降装置
、Ｒは処理室、Ｗは半導体ウエハーである。
Fig. 1 is a schematic diagram showing a cleaning device of the present invention, and Fig. 2 is a schematic diagram showing another embodiment of the cleaning device. Conveyor, 4 is a conveyance device, 5 is a hood,
6 is a blower fan, 7 is a filter, 8 is a lifting device, R is a processing chamber, and W is a semiconductor wafer.
Claims (1)
て処理する半導体製造設備において、該載台の上
方にフードと、フードの上部に送風フアンとを設
けたことを特徴とする半導体製造設備の清浄装置
。 (2) 前記フードと送風フアンの間には空気清浄
用フイルターを配設した実用新案登録請求の範囲
第１項記載の半導体製造設備の清浄装置。[Scope of Claim for Utility Model Registration] (1) Semiconductor manufacturing equipment that transports semiconductor wafers on a platform to a processing chamber for processing, which is provided with a hood above the platform and a blower fan above the hood. A cleaning device for semiconductor manufacturing equipment characterized by the following. (2) The cleaning device for semiconductor manufacturing equipment according to claim 1, wherein an air cleaning filter is disposed between the hood and the blower fan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18713885U JPS6295712U (en) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18713885U JPS6295712U (en) | 1985-12-04 | 1985-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6295712U true JPS6295712U (en) | 1987-06-18 |
Family
ID=31137334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18713885U Pending JPS6295712U (en) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6295712U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111664106A (en) * | 2019-03-08 | 2020-09-15 | 北京北方华创微电子装备有限公司 | Fan control method and fan control device |
-
1985
- 1985-12-04 JP JP18713885U patent/JPS6295712U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111664106A (en) * | 2019-03-08 | 2020-09-15 | 北京北方华创微电子装备有限公司 | Fan control method and fan control device |
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