JPS63115221U - - Google Patents
Info
- Publication number
- JPS63115221U JPS63115221U JP726787U JP726787U JPS63115221U JP S63115221 U JPS63115221 U JP S63115221U JP 726787 U JP726787 U JP 726787U JP 726787 U JP726787 U JP 726787U JP S63115221 U JPS63115221 U JP S63115221U
- Authority
- JP
- Japan
- Prior art keywords
- section
- wafer
- test
- carrier
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000428 dust Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000005406 washing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Sampling And Sample Adjustment (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案にかかる清浄度モニターの搬送
構成図、第２図は本考案にかかる清浄度モニター
の配置図、第３図は従来のウエハーゴミ検出装置
の搬送構成図、第４図は検出部の概要斜視図であ
る。
図において、１はウエハー、２はローダ、３は
検出部、４はアンローダ、５はレーザダイトード
、６はレンズ系、７はホトマル、１２はキヤリア
部、１４は洗浄部、１５はロボツトアーム、２０
は半導体製造装置の処理チヤンバ、２１はセンダ
、２２はレシーバ、を示している。
Fig. 1 is a transport configuration diagram of a cleanliness monitor according to the present invention, Fig. 2 is a layout diagram of a cleanliness monitor according to the present invention, Fig. 3 is a transport configuration diagram of a conventional wafer dust detection device, and Fig. 4 is a transport configuration diagram of a conventional wafer dust detection device. It is a schematic perspective view of a detection part. In the figure, 1 is a wafer, 2 is a loader, 3 is a detection unit, 4 is an unloader, 5 is a laser diode, 6 is a lens system, 7 is a photomultiplier, 12 is a carrier unit, 14 is a cleaning unit, 15 is a robot arm, 20
2 shows a processing chamber of the semiconductor manufacturing equipment, 21 a sender, and 22 a receiver.
Claims (1)
該ウエハー処理室内にテスト用ウエハーを搬入搬
出するキヤリア部と、該テスト用ウエハー表面に
付着したゴミを検出する検出部と、該テスト用ウ
エハーを洗浄してゴミを落とす洗浄部と、該キヤ
リア部、検出部、洗浄部と順にテスト用ウエハー
を移動する移動手段とを備え、該キヤリア部、検
出部、洗浄部および移動手段が密閉室内に設けら
れてなることを特徴とする清浄度モニター。 Connected to the wafer processing chamber of semiconductor manufacturing equipment,
A carrier section that carries test wafers into and out of the wafer processing chamber, a detection section that detects dust attached to the surface of the test wafer, a cleaning section that cleans the test wafer and removes dust, and the carrier section. A cleanliness monitor comprising: a detection section, a cleaning section, and a moving means for sequentially moving a test wafer, the carrier section, the detection section, the washing section, and the moving means being provided in a closed chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP726787U JPS63115221U (en) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP726787U JPS63115221U (en) | 1987-01-20 | 1987-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115221U true JPS63115221U (en) | 1988-07-25 |
Family
ID=30790559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP726787U Pending JPS63115221U (en) | 1987-01-20 | 1987-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115221U (en) |
-
1987
- 1987-01-20 JP JP726787U patent/JPS63115221U/ja active Pending
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