JPH0614473Y2 - Portable clean bench - Google Patents
Portable clean benchInfo
- Publication number
- JPH0614473Y2 JPH0614473Y2 JP1987179746U JP17974687U JPH0614473Y2 JP H0614473 Y2 JPH0614473 Y2 JP H0614473Y2 JP 1987179746 U JP1987179746 U JP 1987179746U JP 17974687 U JP17974687 U JP 17974687U JP H0614473 Y2 JPH0614473 Y2 JP H0614473Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- housing
- clean bench
- air
- portable clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Cleaning In General (AREA)
Description
【考案の詳細な説明】 (産業上の利用分野) 本考案はダストを特にきらう工程を含む半導体、精密機
械、電子部品等の製造開発において必要とする清浄な空
気を供給する装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a device for supplying clean air required for manufacturing and developing semiconductors, precision machinery, electronic parts, etc., including a process of particularly rejecting dust. .
(従来の技術) ダストを多く含む外部空気を吸引してエアフィルタを通
過させ、そこにダストを捕獲し、ダストを減少させた空
気を流すことにより、特に清浄度が要求される空間領域
を形成するクリーンベンチが、半導体LSI製造分野で
使用されている。(Prior art) A space area that requires particularly cleanliness is formed by sucking in external air that contains a lot of dust, letting it pass through an air filter, capturing the dust there, and letting air with reduced dust flow. Clean benches are used in the field of semiconductor LSI manufacturing.
LSI製造ではこれらのクリーンベンチは、建屋である
クリーンルーム内部に設置され、局所的にクリーンルー
ムよりさらに清浄化した領域を作くるために設置する。
クリーンベンチを装置全体にかぶせるか、クリーンベン
チを設けた領域を作業領域とすることにより、ウェハへ
のダクト付着を最小限にすることができる。他の分野で
はクリーンでない通常の建屋に、クリーンベンチを設置
することも行われる。In LSI manufacturing, these clean benches are installed inside a clean room, which is a building, and are installed in order to locally create a cleaner area than the clean room.
The duct adhesion to the wafer can be minimized by covering the entire apparatus with the clean bench or by using the area where the clean bench is provided as the working area. It is also possible to install a clean bench in a normal building that is not clean in other fields.
ウェハを装置間で移動しようとするとき、ウェハは最高
に清浄化された領域から出て、ややダストの多い領域を
通過することになるが、従来、クリーントンネルまたは
クリーンブースの概念に基づいて装置間全体を清浄化
し、装置間移動においても最高の清浄度を保証する方法
が一般的であった。この方法の欠点は、設備および電力
のコスト増大につながることであり、より安価な方法で
同程度の清浄度が得られる方法が望まれていた。When attempting to move a wafer between devices, the wafer will exit the most cleaned area and pass through a slightly dustier area, which is traditionally based on the concept of a clean tunnel or clean booth. A general method is to clean the entire space and ensure the highest cleanliness even when moving between devices. The disadvantage of this method is that it leads to an increase in the cost of equipment and power, and there has been a demand for a method that can obtain the same degree of cleanliness with a cheaper method.
(考案が解決しようとする問題点) 本考案はクリーントンネルまたはクリーンブースを設備
せず、小型の可搬式設備だけでウェハを固定クリーンベ
ンチ間または装置間で輸送でき、かつ低コストでウェハ
の清浄度を確保できる可搬式クリーンベンチを提供する
ことにある。(Problems to be solved by the invention) This invention does not have a clean tunnel or a clean booth, and can transport wafers between fixed clean benches or equipment with only small portable equipment, and clean wafers at low cost. It is to provide a portable clean bench that can secure the degree.
(問題点を解決するための手段) 本考案は、筐体内の上部にエアフィルタと送風装置を設
け、筐体内の下部に送風装置を駆動するための電源を設
け、筐体の側壁の下部または筐体の床板に空気ぬき孔を
設け、筐体の床板の下部に車輪を設ける。(Means for Solving Problems) The present invention provides an air filter and an air blower in an upper part of a housing, a power supply for driving the air blower in a lower part of the housing, and a lower part of a side wall of the housing. Air holes are provided in the floor plate of the housing, and wheels are provided below the floor plate of the housing.
また必要に応じて、筐体内の中部にパンチング孔を多数
有する物品を置くための仕切板を設け、筐体の天井と床
板を除く4側面のうち、相対する2側面にだけ180゜開く
扉を設ける。If necessary, a partition plate for placing articles with many punching holes is provided in the center of the housing, and a door that opens 180 ° only on two opposite side surfaces out of the four side surfaces of the housing except the ceiling and floor boards. Set up.
従来のクリーンベンチは装置にかぶせるように設置する
か、特定の高清浄なる作業領域を形成するためのもので
あり、大型であり、かつ床に固定して使用するものであ
る。The conventional clean bench is installed so as to cover the device or forms a specific highly clean work area, is large, and is fixed to the floor for use.
本考案は送風機とエアフィルタ機構を有することは通常
と同じであるが、車輪をもち、充電式電池が送風機に電
力を供給することにより、自由に移動可能にし、装置前
面の位置まで移動して装置搬送部と直に接触させ、清浄
度の悪い領域に出さずに装置に物品を送れるよう扉の位
置を設定する。Although the present invention has a blower and an air filter mechanism as usual, it has wheels, and a rechargeable battery supplies power to the blower so that it can move freely and move to the position in front of the device. The door position is set so that the product can be directly brought into contact with the apparatus transporting section and the articles can be sent to the apparatus without being put out in an area with poor cleanliness.
(実施例) 第1図は本考案の一実施例の構成を示し、(a)は側面
図、(b)は平面図である。全体の寸法・重量は人間が手
で押して移動できるような程度であり、例えば400mm×4
00mm×1200mmといったものにすれば扱い易い。第1図に
おいて、1はプレフィルタ、2は送風機、3はメインフ
ィルタであり、送風機2を稼働させることにより、プレ
フィルタ1を通して外部の空気を取り込み、メインフィ
ルタ3を通して清浄化した空気を下部の清浄空間領域4
に送る。下部の清浄空間領域4はこのクリーンベンチで
作られ、半導体ウェハ等のダクトをきらう加工品を、こ
の清浄空間領域4の中に入れて工程中の清浄度を確保す
る。下部の清浄空間領域4は物品をのせるため仕切板5
を設ける。仕切板5は風向を一定にそろえるためパンチ
ング孔を設け、さらに風を逃がすために、ベンチ下部に
空気ぬき孔6を設けた。清浄空間領域4に物品を出し入
れするため、扉7を持っているが、扉7は相対する2面
に設ければこのクリーンベンチを装置搬送部の前面に直
に置くことにより、一方の側から作業者が手をさし入
れ、物品を清浄度の悪い空気にさらすことなく、装置に
物品を挿入することができる。清浄空間領域4の下部に
充電式電池8を設置して、送風機2に電力を供給する。
またクリーンベンチの下部に車輪9を設けてあるので、
容易に移動することができる。(Embodiment) FIG. 1 shows a configuration of an embodiment of the present invention, (a) is a side view and (b) is a plan view. The overall size and weight is such that it can be pushed and moved by humans, for example 400 mm x 4
If you use something like 00mm x 1200mm, it will be easy to handle. In FIG. 1, 1 is a pre-filter, 2 is a blower, and 3 is a main filter. By operating the blower 2, outside air is taken in through the pre-filter 1 and purified air is passed through the main filter 3 at the lower part. Clean space area 4
Send to. The lower clean space region 4 is made by this clean bench, and a processed product such as a semiconductor wafer which is difficult to duct is put in the clean space region 4 to secure cleanliness during the process. The lower clean space region 4 is a partition plate 5 for placing articles.
To provide. The partition plate 5 was provided with punching holes for uniforming the wind direction, and an air vent hole 6 was provided at the bottom of the bench in order to allow the wind to escape. A door 7 is provided for loading and unloading articles into and from the clean space area 4. However, if the door 7 is provided on two opposite surfaces, the clean bench can be placed directly on the front surface of the apparatus transfer section so that it can be installed from one side. An operator can insert an item into the device without reaching in and exposing the item to unclean air. A rechargeable battery 8 is installed below the clean space region 4 to supply power to the blower 2.
In addition, since the wheels 9 are provided at the bottom of the clean bench,
Can be easily moved.
(考案の効果) 本考案は、ウェハ清浄度保護のため簡易な可搬式クリー
ンベンチであるので、従来と異なり、固定クリーンベン
チで保護された装置間をウェハが移動するとき、ウェハ
はダストの多い領域を通過させることがなく、また必ず
しも大型のクリーントンネルまたはクリーンブースを必
要とせず、クリーンルーム設備の簡易化と電力コストの
低減を図ることができる。(Effect of the Invention) Since the present invention is a simple portable clean bench for protecting the wafer cleanliness, unlike the conventional case, when the wafer is moved between the devices protected by the fixed clean bench, the wafer has a lot of dust. Since it does not pass through the area and does not necessarily require a large clean tunnel or clean booth, the clean room facility can be simplified and the power cost can be reduced.
第1図は本考案の一実施例の構成を示し、(a)は側面
図、(b)は平面図である。 1……プレフィルタ、2……送風機 3……メインフィルタ、4……清浄空間領域 5……仕切板、6……空気ぬき孔 7……扉、8……充電式電池 9……車輪、10……風の流れFIG. 1 shows the configuration of an embodiment of the present invention, (a) is a side view and (b) is a plan view. 1 ... Pre-filter, 2 ... Blower 3 ... Main filter, 4 ... Clean space area 5 ... Partition plate, 6 ... Air vent hole 7 ... Door, 8 ... Rechargeable battery 9 ... Wheels, 10 …… Wind flow
Claims (1)
設け、筐体内の下部に送風装置を駆動するための電源を
設け、筐体の側壁の下部または筐体の床板に空気ぬき孔
を設け、筐体の床板の下部に車両を設けた可搬式クリー
ンベンチにおいて、 筐体の天井と床板を除く4側面のうち、相対する2側面
にだけ180゜開く扉を設けたことを特徴とする可搬式クリ
ーンベンチ。1. An air filter and an air blower are provided in an upper part of the housing, a power source for driving the air blower is provided in a lower part of the housing, and an air vent hole is provided in a lower part of a side wall of the housing or a floor plate of the housing. In a portable clean bench provided with a vehicle below the floor plate of the housing, a door that opens 180 ° is provided only on two opposite side surfaces out of the four side surfaces excluding the ceiling and floor board of the housing. Portable clean bench.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987179746U JPH0614473Y2 (en) | 1987-11-27 | 1987-11-27 | Portable clean bench |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987179746U JPH0614473Y2 (en) | 1987-11-27 | 1987-11-27 | Portable clean bench |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0184424U JPH0184424U (en) | 1989-06-05 |
JPH0614473Y2 true JPH0614473Y2 (en) | 1994-04-13 |
Family
ID=31471291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987179746U Expired - Lifetime JPH0614473Y2 (en) | 1987-11-27 | 1987-11-27 | Portable clean bench |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0614473Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3688784B2 (en) * | 1995-12-26 | 2005-08-31 | 大日本スクリーン製造株式会社 | Substrate processing apparatus with air filter |
-
1987
- 1987-11-27 JP JP1987179746U patent/JPH0614473Y2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0184424U (en) | 1989-06-05 |
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