JPH0614473Y2 - Portable clean bench - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a device for supplying clean air required for manufacturing and developing semiconductors, precision machinery, electronic parts, etc., including a process of particularly rejecting dust. .

(Prior art) A space area that requires particularly cleanliness is formed by sucking in external air that contains a lot of dust, letting it pass through an air filter, capturing the dust there, and letting air with reduced dust flow. Clean benches are used in the field of semiconductor LSI manufacturing.

In LSI manufacturing, these clean benches are installed inside a clean room, which is a building, and are installed in order to locally create a cleaner area than the clean room.
The duct adhesion to the wafer can be minimized by covering the entire apparatus with the clean bench or by using the area where the clean bench is provided as the working area. It is also possible to install a clean bench in a normal building that is not clean in other fields.

When attempting to move a wafer between devices, the wafer will exit the most cleaned area and pass through a slightly dustier area, which is traditionally based on the concept of a clean tunnel or clean booth. A general method is to clean the entire space and ensure the highest cleanliness even when moving between devices. The disadvantage of this method is that it leads to an increase in the cost of equipment and power, and there has been a demand for a method that can obtain the same degree of cleanliness with a cheaper method.

(Problems to be solved by the invention) This invention does not have a clean tunnel or a clean booth, and can transport wafers between fixed clean benches or equipment with only small portable equipment, and clean wafers at low cost. It is to provide a portable clean bench that can secure the degree.

(Means for Solving Problems) The present invention provides an air filter and an air blower in an upper part of a housing, a power supply for driving the air blower in a lower part of the housing, and a lower part of a side wall of the housing. Air holes are provided in the floor plate of the housing, and wheels are provided below the floor plate of the housing.

If necessary, a partition plate for placing articles with many punching holes is provided in the center of the housing, and a door that opens 180 ° only on two opposite side surfaces out of the four side surfaces of the housing except the ceiling and floor boards. Set up.

The conventional clean bench is installed so as to cover the device or forms a specific highly clean work area, is large, and is fixed to the floor for use.

Although the present invention has a blower and an air filter mechanism as usual, it has wheels, and a rechargeable battery supplies power to the blower so that it can move freely and move to the position in front of the device. The door position is set so that the product can be directly brought into contact with the apparatus transporting section and the articles can be sent to the apparatus without being put out in an area with poor cleanliness.

(Embodiment) FIG. 1 shows a configuration of an embodiment of the present invention, (a) is a side view and (b) is a plan view. The overall size and weight is such that it can be pushed and moved by humans, for example 400 mm x 4
If you use something like 00mm x 1200mm, it will be easy to handle. In FIG. 1, 1 is a pre-filter, 2 is a blower, and 3 is a main filter. By operating the blower 2, outside air is taken in through the pre-filter 1 and purified air is passed through the main filter 3 at the lower part. Clean space area 4
Send to. The lower clean space region 4 is made by this clean bench, and a processed product such as a semiconductor wafer which is difficult to duct is put in the clean space region 4 to secure cleanliness during the process. The lower clean space region 4 is a partition plate 5 for placing articles.
To provide. The partition plate 5 was provided with punching holes for uniforming the wind direction, and an air vent hole 6 was provided at the bottom of the bench in order to allow the wind to escape. A door 7 is provided for loading and unloading articles into and from the clean space area 4. However, if the door 7 is provided on two opposite surfaces, the clean bench can be placed directly on the front surface of the apparatus transfer section so that it can be installed from one side. An operator can insert an item into the device without reaching in and exposing the item to unclean air. A rechargeable battery 8 is installed below the clean space region 4 to supply power to the blower 2.
In addition, since the wheels 9 are provided at the bottom of the clean bench,
Can be easily moved.

(Effect of the Invention) Since the present invention is a simple portable clean bench for protecting the wafer cleanliness, unlike the conventional case, when the wafer is moved between the devices protected by the fixed clean bench, the wafer has a lot of dust. Since it does not pass through the area and does not necessarily require a large clean tunnel or clean booth, the clean room facility can be simplified and the power cost can be reduced.

[Brief description of drawings]

FIG. 1 shows the configuration of an embodiment of the present invention, (a) is a side view and (b) is a plan view. 1 ... Pre-filter, 2 ... Blower 3 ... Main filter, 4 ... Clean space area 5 ... Partition plate, 6 ... Air vent hole 7 ... Door, 8 ... Rechargeable battery 9 ... Wheels, 10 …… Wind flow

Claims (1)

[Scope of utility model registration request] 1. An air filter and an air blower are provided in an upper part of the housing, a power source for driving the air blower is provided in a lower part of the housing, and an air vent hole is provided in a lower part of a side wall of the housing or a floor plate of the housing. In a portable clean bench provided with a vehicle below the floor plate of the housing, a door that opens 180 ° is provided only on two opposite side surfaces out of the four side surfaces excluding the ceiling and floor board of the housing. Portable clean bench.