JPS6130233U - Vacuum processing equipment - Google Patents

Vacuum processing equipment

Info

Publication number
JPS6130233U
JPS6130233U JP11444884U JP11444884U JPS6130233U JP S6130233 U JPS6130233 U JP S6130233U JP 11444884 U JP11444884 U JP 11444884U JP 11444884 U JP11444884 U JP 11444884U JP S6130233 U JPS6130233 U JP S6130233U
Authority
JP
Japan
Prior art keywords
vacuum processing
transfer device
load
processing equipment
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11444884U
Other languages
Japanese (ja)
Other versions
JPH0541546Y2 (en
Inventor
義雄 渡辺
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP11444884U priority Critical patent/JPS6130233U/en
Publication of JPS6130233U publication Critical patent/JPS6130233U/en
Application granted granted Critical
Publication of JPH0541546Y2 publication Critical patent/JPH0541546Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案による被処理体の乾燥方法を説明ずる装
置の断面図、第２図は搬送ベルトおよびシャツの側断面
図、第３図は従来例による被処理体の乾燥方法を説明す
る−装置の断面図である。 図において、１は被処理体、２は窒素室、３は搬送ベル
ト、４，６はゲートバルブ、５は真空口−ドロツク室、
７は真空室、８はシャワ、を示す。FIG. 1 is a cross-sectional view of an apparatus for explaining the method of drying objects to be processed according to the present invention, FIG. 2 is a side cross-sectional view of a conveyor belt and a shirt, and FIG. 3 is a diagram explaining a conventional method for drying objects to be processed. - a sectional view of the device; In the figure, 1 is an object to be processed, 2 is a nitrogen chamber, 3 is a conveyor belt, 4 and 6 are gate valves, 5 is a vacuum port-dock chamber,
7 indicates a vacuum chamber, and 8 indicates a shower.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空処理室と、該真空処理室にゲートバルブを介して結
合されたロードロック室と、該ロードロック室へ大気中
から被処理体を搬入するための搬送装置と、該搬送装置
の周囲に設けられた乾燥ガス吹き出七口とを具備し、該
被処理体を該ロードロック室へ搬送する直前の大気中で
該被処理体の乾燥処理を行うようにしたことを特徴とす
る真空処理装置。a vacuum processing chamber, a load-lock chamber coupled to the vacuum processing chamber via a gate valve, a transfer device for carrying the object to be processed from the atmosphere into the load-lock chamber, and a transfer device provided around the transfer device. 1. A vacuum processing apparatus, comprising seven drying gas blow-off ports for drying the object to be processed in the atmosphere immediately before transporting the object to the load lock chamber.
JP11444884U 1984-07-27 1984-07-27 Vacuum processing equipment Granted JPS6130233U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11444884U JPS6130233U (en) 1984-07-27 1984-07-27 Vacuum processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11444884U JPS6130233U (en) 1984-07-27 1984-07-27 Vacuum processing equipment

Publications (2)

Publication Number Publication Date
JPS6130233U true JPS6130233U (en) 1986-02-24
JPH0541546Y2 JPH0541546Y2 (en) 1993-10-20

Family

ID=30673466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11444884U Granted JPS6130233U (en) 1984-07-27 1984-07-27 Vacuum processing equipment

Country Status (1)

Country Link
JP (1) JPS6130233U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016070552A (en) * 2014-09-29 2016-05-09 日立金属株式会社 Drier and magnet piece dry method using drier

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016070552A (en) * 2014-09-29 2016-05-09 日立金属株式会社 Drier and magnet piece dry method using drier

Also Published As

Publication number Publication date
JPH0541546Y2 (en) 1993-10-20

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