JPH0374665U - - Google Patents
Info
- Publication number
- JPH0374665U JPH0374665U JP13558289U JP13558289U JPH0374665U JP H0374665 U JPH0374665 U JP H0374665U JP 13558289 U JP13558289 U JP 13558289U JP 13558289 U JP13558289 U JP 13558289U JP H0374665 U JPH0374665 U JP H0374665U
- Authority
- JP
- Japan
- Prior art keywords
- processing apparatus
- plasma processing
- reaction gas
- peripheral wall
- predetermined position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 2
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来の断面図である。
４は下電極、１１はウエーハ、１３は真空容器
、２０は反応ガス導入ノズル、２３は排気口を示
す。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a conventional sectional view. 4 is a lower electrode, 11 is a wafer, 13 is a vacuum container, 20 is a reaction gas introduction nozzle, and 23 is an exhaust port.
Claims (1)
ラズマ処理装置に於いて、真空器の上面、下面に
それぞれ上電極、下電極を相対向させて設け、真
空容器周壁の所要位置に反応ガス導入ノズルを設
け、該周壁の所要位置に反応ガス排気口を設けた
ことを特徴とするプラズマ処理装置。 In a plasma processing apparatus that performs processing in an atmosphere of 10-1 torr or less, an upper electrode and a lower electrode are provided facing each other on the upper and lower surfaces of the vacuum chamber, respectively, and a reaction gas introduction nozzle is installed at a predetermined position on the peripheral wall of the vacuum chamber. 1. A plasma processing apparatus, comprising: a plasma processing apparatus, and a reaction gas exhaust port provided at a predetermined position on the peripheral wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13558289U JPH0374665U (en) | 1989-11-22 | 1989-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13558289U JPH0374665U (en) | 1989-11-22 | 1989-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374665U true JPH0374665U (en) | 1991-07-26 |
Family
ID=31682843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13558289U Pending JPH0374665U (en) | 1989-11-22 | 1989-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374665U (en) |
-
1989
- 1989-11-22 JP JP13558289U patent/JPH0374665U/ja active Pending