JPS62145334U - - Google Patents
Info
- Publication number
- JPS62145334U JPS62145334U JP3447286U JP3447286U JPS62145334U JP S62145334 U JPS62145334 U JP S62145334U JP 3447286 U JP3447286 U JP 3447286U JP 3447286 U JP3447286 U JP 3447286U JP S62145334 U JPS62145334 U JP S62145334U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- workpiece
- processing apparatus
- sent
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Description
第１図はこの考案の実施例であるサセプタの外
観斜視図、第２図はこの考案の他の実施例である
サセプタのセラミツクピンを示す斜視図である。
第３図は一般的なプラズマ処理装置の構造を示す
図、第４図は従来のサセプタの概略斜視図である
。
１０…サセプタ、１１…セラミツクピン、１２
…ウエハ。
FIG. 1 is an external perspective view of a susceptor according to an embodiment of this invention, and FIG. 2 is a perspective view showing a ceramic pin of a susceptor according to another embodiment of this invention.
FIG. 3 is a diagram showing the structure of a general plasma processing apparatus, and FIG. 4 is a schematic perspective view of a conventional susceptor. 10...Susceptor, 11...Ceramic pin, 12
...Wafer.
Claims (1)
その上面に被処理物を載置するサセプタにおいて
、 上面周縁部に、前記被処理物の幅よりも狭い間
隔で設けられた複数本の突起を有することを特徴
とする半導体処理装置のサセプタ。[Scope of claim for utility model registration] Installed in a reaction chamber into which reaction gas is sent,
What is claimed is: 1. A susceptor for a semiconductor processing apparatus on which a workpiece is placed on an upper surface thereof, the susceptor having a plurality of protrusions provided at a peripheral edge of the upper surface at intervals narrower than the width of the workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3447286U JPS62145334U (en) | 1986-03-08 | 1986-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3447286U JPS62145334U (en) | 1986-03-08 | 1986-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62145334U true JPS62145334U (en) | 1987-09-12 |
Family
ID=30843058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3447286U Pending JPS62145334U (en) | 1986-03-08 | 1986-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62145334U (en) |
-
1986
- 1986-03-08 JP JP3447286U patent/JPS62145334U/ja active Pending