JPS631324U - - Google Patents
Info
- Publication number
- JPS631324U JPS631324U JP9327286U JP9327286U JPS631324U JP S631324 U JPS631324 U JP S631324U JP 9327286 U JP9327286 U JP 9327286U JP 9327286 U JP9327286 U JP 9327286U JP S631324 U JPS631324 U JP S631324U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wafer boat
- diffusion furnace
- wafer
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000003082 abrasive agent Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000007788 roughening Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 10
Description
第1図は、本考案の一実施例であるウエーハボ
ートの斜視図。第2図は、本考案の一実施例であ
るウエーハボートの平面図。第3図は、従来のウ
エーハボートの斜視図。第4図は、一次拡散炉用
ウエーハボートの斜視図。第5図は、ウエーハを
搭載したウエーハボートの正面断面図。
1…ウエーハボート、2…ウエーハボート内壁
面、3…面粗れ加工面、4…一次拡散炉用ウエー
ハボート、5…溝、6…ウエーハ。
FIG. 1 is a perspective view of a wafer boat that is an embodiment of the present invention. FIG. 2 is a plan view of a wafer boat that is an embodiment of the present invention. FIG. 3 is a perspective view of a conventional wafer boat. FIG. 4 is a perspective view of a wafer boat for a primary diffusion furnace. FIG. 5 is a front sectional view of a wafer boat loaded with wafers. DESCRIPTION OF SYMBOLS 1... Wafer boat, 2... Wafer boat inner wall surface, 3... Surface roughened surface, 4... Wafer boat for primary diffusion furnace, 5... Groove, 6... Wafer.
Claims (1)
内壁が、面粗れ加工されていることを特徴とする
拡散炉用ウエーハボート。 2 前記ボート内壁面が、#20乃至#2000
の研摩材によつてサンドブラスト加工されている
ことを特徴とする実用新案登録請求の範囲第1項
記載の拡散炉用ウエーハボート。[Claims for Utility Model Registration] 1. A wafer boat for a diffusion furnace, characterized in that the inner wall of the boat is subjected to a surface roughening process. 2 The inner wall surface of the boat is #20 to #2000
A wafer boat for a diffusion furnace according to claim 1, wherein the wafer boat is sandblasted with an abrasive material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986093272U JPH0220831Y2 (en) | 1986-06-20 | 1986-06-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986093272U JPH0220831Y2 (en) | 1986-06-20 | 1986-06-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS631324U true JPS631324U (en) | 1988-01-07 |
JPH0220831Y2 JPH0220831Y2 (en) | 1990-06-06 |
Family
ID=30955717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986093272U Expired JPH0220831Y2 (en) | 1986-06-20 | 1986-06-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0220831Y2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52143760A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Quartz tube in heat treatment furnace |
-
1986
- 1986-06-20 JP JP1986093272U patent/JPH0220831Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52143760A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Quartz tube in heat treatment furnace |
Also Published As
Publication number | Publication date |
---|---|
JPH0220831Y2 (en) | 1990-06-06 |