JPH02140852U - - Google Patents
Info
- Publication number
- JPH02140852U JPH02140852U JP4933189U JP4933189U JPH02140852U JP H02140852 U JPH02140852 U JP H02140852U JP 4933189 U JP4933189 U JP 4933189U JP 4933189 U JP4933189 U JP 4933189U JP H02140852 U JPH02140852 U JP H02140852U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- recessed portion
- transporting
- tray
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims 1
Description
第１図は本考案に係る搬送用トレーの一部断面
概略斜視図、第２図は正規の形状の半導体ウエー
ハを収納したときの平面図、第３図は同じく縦断
面図、第４図は不定形な半導体ウエーハを収納し
たときの平面図、第５図は同じく縦断面図である
。第６図は従来の搬送用トレーの斜視図、第７図
は正規の形状の半導体ウエーハを収納したときの
平面図、第８図は不定形な半導体ウエーハを収納
したときの平面図である。
４……凹陥部、４ａ……周縁、５……窪部、Ｗ
，ｗ……半導体ウエーハ。
Fig. 1 is a partially cross-sectional schematic perspective view of a transport tray according to the present invention, Fig. 2 is a plan view when semiconductor wafers of a regular shape are stored, Fig. 3 is a longitudinal sectional view, and Fig. 4 is a schematic perspective view of a transport tray according to the present invention. FIG. 5 is a plan view when an irregularly shaped semiconductor wafer is housed, and a vertical cross-sectional view. FIG. 6 is a perspective view of a conventional transport tray, FIG. 7 is a plan view when regular-shaped semiconductor wafers are stored, and FIG. 8 is a plan view when irregular-shaped semiconductor wafers are stored. 4... Concavity, 4a... Periphery, 5... Recess, W
,w...semiconductor wafer.
Claims (1)
薄型平板状の搬送用トレーであつて、 半導体ウエーハの外径より若干大きな内径の凹
陥部を上面に凹設し、前記凹陥部の周縁より平坦
なままの上面に跨がつて前記凹陥部よりも深い凹
曲面状窪部を凹設したことを特徴とする半導体ウ
エーハの搬送用トレー。[Claims for Utility Model Registration] A thin, flat transport tray for transporting a large number of semiconductor wafers in a horizontal state, which has a recessed part on its upper surface with an inner diameter slightly larger than the outer diameter of the semiconductor wafers, 1. A tray for transporting semiconductor wafers, characterized in that a concavely curved recessed portion deeper than the recessed portion is provided so as to span an upper surface that remains flat than the peripheral edge of the recessed portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4933189U JPH02140852U (en) | 1989-04-25 | 1989-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4933189U JPH02140852U (en) | 1989-04-25 | 1989-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140852U true JPH02140852U (en) | 1990-11-26 |
Family
ID=31566924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4933189U Pending JPH02140852U (en) | 1989-04-25 | 1989-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140852U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002231795A (en) * | 2001-02-05 | 2002-08-16 | Sony Corp | Susceptor |
-
1989
- 1989-04-25 JP JP4933189U patent/JPH02140852U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002231795A (en) * | 2001-02-05 | 2002-08-16 | Sony Corp | Susceptor |
| JP4507414B2 (en) * | 2001-02-05 | 2010-07-21 | ソニー株式会社 | Susceptor |