JPH01106564U - - Google Patents
Info
- Publication number
- JPH01106564U JPH01106564U JP49188U JP49188U JPH01106564U JP H01106564 U JPH01106564 U JP H01106564U JP 49188 U JP49188 U JP 49188U JP 49188 U JP49188 U JP 49188U JP H01106564 U JPH01106564 U JP H01106564U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gas
- electrode
- ejected
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案の第一の実施例を示す縦断側
面図、第２図はこの考案の第二の実施例を示す縦
断側面図、第３図はこの考案の第三の実施例を示
す縦断側面図、第４図は従来例を示す縦断側面図
である。
４…電極、５…板、６…孔、１１…基板、１７
…ガス衝突壁。
Fig. 1 is a vertical side view showing the first embodiment of this invention, Fig. 2 is a longitudinal side view showing the second embodiment of this invention, and Fig. 3 is a longitudinal side view showing the third embodiment of this invention. FIG. 4 is a vertical side view showing a conventional example. 4... Electrode, 5... Plate, 6... Hole, 11... Substrate, 17
...Gas collision wall.
Claims (1)
小な孔からガスを噴出し、その噴出されたガスを
プラズマ放電により分解、イオン化し、生成した
ラジカル、イオン種を前記板に対向する位置に配
設された基板の表面で反応を起こさせることによ
りその基板に膜を形成させるプラズマＣＶＤ装置
において、前記基板と前記電極との間のプラズマ
放電領域の周囲を取り囲むように高温に加熱され
たガス衝突壁を設けたことを特徴とするプラズマ
ＣＶＤ装置。 Gas is ejected from a large number of minute holes formed in a plate attached to the electrode, and the ejected gas is decomposed and ionized by plasma discharge, and the generated radicals and ionic species are placed in a position facing the plate. In a plasma CVD apparatus that forms a film on a substrate by causing a reaction on the surface of the substrate, a gas heated to a high temperature surrounds a plasma discharge region between the substrate and the electrode. A plasma CVD apparatus characterized by being provided with a collision wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49188U JPH01106564U (en) | 1988-01-06 | 1988-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49188U JPH01106564U (en) | 1988-01-06 | 1988-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01106564U true JPH01106564U (en) | 1989-07-18 |
Family
ID=31199565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49188U Pending JPH01106564U (en) | 1988-01-06 | 1988-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01106564U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014078468A (en) * | 2012-10-12 | 2014-05-01 | Toyota Motor Corp | Fuel cell separator manufacturing device |
-
1988
- 1988-01-06 JP JP49188U patent/JPH01106564U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014078468A (en) * | 2012-10-12 | 2014-05-01 | Toyota Motor Corp | Fuel cell separator manufacturing device |