JPS61157331U - - Google Patents
Info
- Publication number
- JPS61157331U JPS61157331U JP3983185U JP3983185U JPS61157331U JP S61157331 U JPS61157331 U JP S61157331U JP 3983185 U JP3983185 U JP 3983185U JP 3983185 U JP3983185 U JP 3983185U JP S61157331 U JPS61157331 U JP S61157331U
- Authority
- JP
- Japan
- Prior art keywords
- gas outlet
- nozzle
- plasma etching
- utility
- mounting hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001020 plasma etching Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は、プラズマエツチング装置のチヤンバ
ー部の縦断面図、第２図は、第１図のガス吹出板
の平面図、第３図、第４図は、本考案の一実施例
を示す要部縦断面図、第５図は、本考案の他の実
施例を示す要部縦断面図である。
４……ガス吹出板、５，６……ノズル、８……
ガス吹出口。
FIG. 1 is a longitudinal sectional view of the chamber portion of the plasma etching apparatus, FIG. 2 is a plan view of the gas blowing plate of FIG. 1, and FIGS. 3 and 4 are schematic diagrams showing one embodiment of the present invention. Fig. 5 is a vertical sectional view of a main part showing another embodiment of the present invention. 4... Gas blowing plate, 5, 6... Nozzle, 8...
Gas outlet.
Claims (1)
設された取付穴に回転自在に取り付けたことを特
徴とするプラズマエツチング装置。 A plasma etching device characterized in that a nozzle having a gas outlet is rotatably attached to a mounting hole drilled in a gas outlet plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3983185U JPS61157331U (en) | 1985-03-22 | 1985-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3983185U JPS61157331U (en) | 1985-03-22 | 1985-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157331U true JPS61157331U (en) | 1986-09-30 |
Family
ID=30548149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3983185U Pending JPS61157331U (en) | 1985-03-22 | 1985-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157331U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0714822A (en) * | 1993-06-15 | 1995-01-17 | Nec Corp | Semiconductor device manufacturing device |
-
1985
- 1985-03-22 JP JP3983185U patent/JPS61157331U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0714822A (en) * | 1993-06-15 | 1995-01-17 | Nec Corp | Semiconductor device manufacturing device |