JPS6255564U - - Google Patents
Info
- Publication number
- JPS6255564U JPS6255564U JP14704985U JP14704985U JPS6255564U JP S6255564 U JPS6255564 U JP S6255564U JP 14704985 U JP14704985 U JP 14704985U JP 14704985 U JP14704985 U JP 14704985U JP S6255564 U JPS6255564 U JP S6255564U
- Authority
- JP
- Japan
- Prior art keywords
- type electrode
- reaction chamber
- electrodes
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001020 plasma etching Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Description
第１図は本考案の実施例の断面図を示す。
１……反応室、２……外部電極、３……内部電
極、４……マツチングネツトワーク、５……ＲＦ
電源（１３．５６ＭＨｚ）、６……上部電極、７
……下部電極、８……ＲＦ電源（３８０ＫＨｚ）
、９……ウエハー、１０……ガス流入口、１１…
…絶縁物、１２……排気口。
FIG. 1 shows a cross-sectional view of an embodiment of the invention. 1... Reaction chamber, 2... External electrode, 3... Internal electrode, 4... Matching network, 5... RF
Power supply (13.56MHz), 6... Upper electrode, 7
...Lower electrode, 8...RF power supply (380KHz)
, 9... wafer, 10... gas inlet, 11...
...Insulator, 12...Exhaust port.
Claims (1)
に平行平板型電極と円筒型電極の両電極を有する
ことを特徴とする枚葉式プラズマエツチング装置
。 1. A single-wafer plasma etching apparatus characterized in that a reaction chamber thereof has both electrodes, a parallel plate type electrode and a cylindrical type electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14704985U JPS6255564U (en) | 1985-09-25 | 1985-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14704985U JPS6255564U (en) | 1985-09-25 | 1985-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255564U true JPS6255564U (en) | 1987-04-06 |
Family
ID=31060059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14704985U Pending JPS6255564U (en) | 1985-09-25 | 1985-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255564U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008155897A (en) * | 2006-12-26 | 2008-07-10 | Hitachi Constr Mach Co Ltd | Steering system for working vehicle |
-
1985
- 1985-09-25 JP JP14704985U patent/JPS6255564U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008155897A (en) * | 2006-12-26 | 2008-07-10 | Hitachi Constr Mach Co Ltd | Steering system for working vehicle |