JPS6255564U - - Google Patents

Info

Publication number
JPS6255564U
JPS6255564U JP14704985U JP14704985U JPS6255564U JP S6255564 U JPS6255564 U JP S6255564U JP 14704985 U JP14704985 U JP 14704985U JP 14704985 U JP14704985 U JP 14704985U JP S6255564 U JPS6255564 U JP S6255564U
Authority
JP
Japan
Prior art keywords
type electrode
reaction chamber
electrodes
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14704985U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14704985U priority Critical patent/JPS6255564U/ja
Publication of JPS6255564U publication Critical patent/JPS6255564U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の実施例の断面図を示す。 1……反応室、2……外部電極、3……内部電
極、4……マツチングネツトワーク、5……RF
電源(13.56MHz)、6……上部電極、7
……下部電極、8……RF電源(380KHz)
、9……ウエハー、10……ガス流入口、11…
…絶縁物、12……排気口。
FIG. 1 shows a cross-sectional view of an embodiment of the invention. 1... Reaction chamber, 2... External electrode, 3... Internal electrode, 4... Matching network, 5... RF
Power supply (13.56MHz), 6... Upper electrode, 7
...Lower electrode, 8...RF power supply (380KHz)
, 9... wafer, 10... gas inlet, 11...
...Insulator, 12...Exhaust port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] プラズマエツチング装置において、その反応室
に平行平板型電極と円筒型電極の両電極を有する
ことを特徴とする枚葉式プラズマエツチング装置
1. A single-wafer plasma etching apparatus characterized in that a reaction chamber thereof has both electrodes, a parallel plate type electrode and a cylindrical type electrode.
JP14704985U 1985-09-25 1985-09-25 Pending JPS6255564U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14704985U JPS6255564U (en) 1985-09-25 1985-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14704985U JPS6255564U (en) 1985-09-25 1985-09-25

Publications (1)

Publication Number Publication Date
JPS6255564U true JPS6255564U (en) 1987-04-06

Family

ID=31060059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14704985U Pending JPS6255564U (en) 1985-09-25 1985-09-25

Country Status (1)

Country Link
JP (1) JPS6255564U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008155897A (en) * 2006-12-26 2008-07-10 Hitachi Constr Mach Co Ltd Steering system for working vehicle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008155897A (en) * 2006-12-26 2008-07-10 Hitachi Constr Mach Co Ltd Steering system for working vehicle

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