JPS61136537U - - Google Patents
Info
- Publication number
- JPS61136537U JPS61136537U JP1786385U JP1786385U JPS61136537U JP S61136537 U JPS61136537 U JP S61136537U JP 1786385 U JP1786385 U JP 1786385U JP 1786385 U JP1786385 U JP 1786385U JP S61136537 U JPS61136537 U JP S61136537U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- gas supply
- plasma
- serves
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
- 239000004005 microsphere Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図および第２図は本考案による電極のそれ
ぞれ異なる実施例を示す縦断面図、第３図は従来
技術における電極の縦断面図である。
１……ウエハ、２……試料電極、３……ガス供
給電極、４……金属電極部、５……多孔質板、６
……ガス導入口、７，８……微小球、９……ガス
噴出孔、１０……カバー板、１１……高周波電源
、１２……真空室。
1 and 2 are longitudinal sectional views showing different embodiments of the electrode according to the present invention, and FIG. 3 is a longitudinal sectional view of the electrode according to the prior art. DESCRIPTION OF SYMBOLS 1... Wafer, 2... Sample electrode, 3... Gas supply electrode, 4... Metal electrode part, 5... Porous plate, 6
... Gas inlet, 7, 8 ... Microsphere, 9 ... Gas outlet, 10 ... Cover plate, 11 ... High frequency power supply, 12 ... Vacuum chamber.
Claims (1)
工装置において、ガス供給を兼ねた電極のガス供
給部分を微小物質で構成したことを特徴とするプ
ラズマ装置用電極。 1. An electrode for a plasma device in a processing device for manufacturing semiconductor devices using plasma, characterized in that a gas supply portion of the electrode that also serves as a gas supply is made of a microscopic substance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1786385U JPS61136537U (en) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1786385U JPS61136537U (en) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61136537U true JPS61136537U (en) | 1986-08-25 |
Family
ID=30505965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1786385U Pending JPS61136537U (en) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136537U (en) |
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1985
- 1985-02-13 JP JP1786385U patent/JPS61136537U/ja active Pending