JPS6363786U - - Google Patents
Info
- Publication number
- JPS6363786U JPS6363786U JP15848486U JP15848486U JPS6363786U JP S6363786 U JPS6363786 U JP S6363786U JP 15848486 U JP15848486 U JP 15848486U JP 15848486 U JP15848486 U JP 15848486U JP S6363786 U JPS6363786 U JP S6363786U
- Authority
- JP
- Japan
- Prior art keywords
- syringe
- conductive paste
- absence
- detecting
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007599 discharging Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
第１図は本考案の実施例を示す図である。 FIG. 1 is a diagram showing an embodiment of the present invention.
Claims (1)
を有する半導体製造装置において、かかるシリン
ジ内の導電性ペストの有無検出装置。 A device for detecting the presence or absence of conductive paste in a syringe in a semiconductor manufacturing apparatus having a mechanism for discharging conductive paste from a syringe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15848486U JPS6363786U (en) | 1986-10-15 | 1986-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15848486U JPS6363786U (en) | 1986-10-15 | 1986-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6363786U true JPS6363786U (en) | 1988-04-27 |
Family
ID=31082019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15848486U Pending JPS6363786U (en) | 1986-10-15 | 1986-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6363786U (en) |
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1986
- 1986-10-15 JP JP15848486U patent/JPS6363786U/ja active Pending