JPH0415845U - - Google Patents
Info
- Publication number
- JPH0415845U JPH0415845U JP5783190U JP5783190U JPH0415845U JP H0415845 U JPH0415845 U JP H0415845U JP 5783190 U JP5783190 U JP 5783190U JP 5783190 U JP5783190 U JP 5783190U JP H0415845 U JPH0415845 U JP H0415845U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fork
- zirconia ceramic
- transports
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical group O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 2
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 230000032258 transport Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Description
第１図は、この考案の搬送フオークの平面図、
側面図である。第２図は、改造前後のウエーハ裏
面塵埃のマツプである。第３図は、従来の搬送機
構の概略図である。
１……搬送フオーク、２……ウエーハ、３……
キヤリア、４……処理室、５……接触面、６……
ジルコニアセラミツク、７……ウエーハ吸引口。
Figure 1 is a plan view of the conveying fork of this invention.
FIG. Figure 2 is a map of dust on the backside of the wafer before and after modification. FIG. 3 is a schematic diagram of a conventional transport mechanism. 1... Conveyance fork, 2... Wafer, 3...
Carrier, 4...Processing chamber, 5...Contact surface, 6...
Zirconia ceramic, 7...Wafer suction port.
Claims (1)
機構において、ウエーハとの吸着面の材質を、ジ
ルコニアセラミツクにしたことを特徴とするウエ
ーハ搬送装置。 A wafer transport device, characterized in that, in a fork transport mechanism that transports a wafer by vacuum suction, the material of the suction surface with the wafer is zirconia ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5783190U JPH0415845U (en) | 1990-05-30 | 1990-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5783190U JPH0415845U (en) | 1990-05-30 | 1990-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415845U true JPH0415845U (en) | 1992-02-07 |
Family
ID=31582897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5783190U Pending JPH0415845U (en) | 1990-05-30 | 1990-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415845U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05275513A (en) * | 1992-03-27 | 1993-10-22 | Kyocera Corp | Semiconductor wafer retaining device |
-
1990
- 1990-05-30 JP JP5783190U patent/JPH0415845U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05275513A (en) * | 1992-03-27 | 1993-10-22 | Kyocera Corp | Semiconductor wafer retaining device |