JPH03126053U

JPH03126053U -

Info

Publication number: JPH03126053U
Application number: JP3535990U
Authority: JP
Priority date: 1990-03-30
Filing date: 1990-03-30
Publication date: 1991-12-19

Description

[Brief explanation of drawings]

第１図及び第２図は本考案の一実施例を示すも
のであつて、第１図は搬送アームの先端部吸着面
の斜視図、第２図は搬送アームの傾斜角度調整機
構の側面図、第３図は搬送アームを用いたメカニ
カル搬送装置の正面図、第４図は従来例を示すも
のであり、ベルト搬送装置の正面図である。１……ウエーハ、２……キヤリア、６……搬送
アーム、６ａ……先端部吸着面、８……吸着孔（
真空吸着孔）、９……センサ孔、１０……揺動台
（傾斜角度調整機構）、１１……カム（傾斜角度
調整機構）、１２……モータ（傾斜角度調整機構
）、１３……圧力検出器（エアーセンサ）、１４
……差動増幅器（エアーセンサ）。 1 and 2 show an embodiment of the present invention, in which FIG. 1 is a perspective view of the suction surface at the tip of the transfer arm, and FIG. 2 is a side view of the inclination angle adjustment mechanism of the transfer arm. , FIG. 3 is a front view of a mechanical conveyance device using a conveyance arm, and FIG. 4 is a front view of a belt conveyance device, which shows a conventional example. 1... Wafer, 2... Carrier, 6... Transfer arm, 6a... Tip suction surface, 8... Suction hole (
vacuum suction hole), 9... sensor hole, 10... rocking table (tilt angle adjustment mechanism), 11... cam (tilt angle adjustment mechanism), 12... motor (tilt angle adjustment mechanism), 13... pressure Detector (air sensor), 14
...Differential amplifier (air sensor).

Claims

[Scope of Claim for Utility Model Registration] A wafer transfer arm that has a vacuum suction hole on the suction surface of the tip and transports the wafer by suctioning the suction surface of the tip to the back side of a wafer stored in a carrier and pulling it out. , an air sensor that detects the inclination between the tip suction surface and the back surface of the wafer using two or more sensor holes provided around the vacuum suction hole on the tip suction surface; A wafer transfer arm characterized by comprising an inclination angle adjustment mechanism that changes the inclination angle of a suction surface.