JPS63148657U - - Google Patents
Info
- Publication number
- JPS63148657U JPS63148657U JP3998387U JP3998387U JPS63148657U JP S63148657 U JPS63148657 U JP S63148657U JP 3998387 U JP3998387 U JP 3998387U JP 3998387 U JP3998387 U JP 3998387U JP S63148657 U JPS63148657 U JP S63148657U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- vacuum suction
- suction nozzle
- tip surface
- nozzle base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 230000035699 permeability Effects 0.000 claims 1
Description
第１図は本考案の一実施例に係る真空吸着ノズ
ルの縦断面図、第２図はその平面図、第３図はそ
の基板を吸着した状態における縦断面図、第４図
は従来の真空吸着ノズルの縦断面図、第５図は従
来の真空吸着ノズルの部分断面側面図である。
図面中、１０はノズルベース、２０は多孔質セ
ラミツクス、２１は先端面、３０はゴムスカート
、３１は先端部、Ｗは基板である。
FIG. 1 is a vertical cross-sectional view of a vacuum suction nozzle according to an embodiment of the present invention, FIG. A vertical cross-sectional view of the suction nozzle, and FIG. 5 is a partial cross-sectional side view of a conventional vacuum suction nozzle. In the drawings, 10 is a nozzle base, 20 is porous ceramics, 21 is a tip surface, 30 is a rubber skirt, 31 is a tip, and W is a substrate.
Claims (1)
記ノズルベースの先端開口に設けられた通気性を
有する多孔質セラミツクスと、前記セラミツクス
周囲に該セラミツクの先端面より突出して設けら
れて薄板の基板が直接該セラミツクスの先端面に
吸着され得る可撓性を有する環状のゴムスカート
を備えたことを特徴とする基板搬送用真空吸着ノ
ズル。 A cylindrical nozzle base connected to a vacuum source, a porous ceramic having air permeability provided at the tip opening of the nozzle base, and a thin substrate provided around the ceramic protruding from the tip surface of the ceramic. 1. A vacuum suction nozzle for conveying a substrate, characterized in that the vacuum suction nozzle is equipped with a flexible annular rubber skirt that can be directly suctioned to the tip surface of the ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3998387U JPS63148657U (en) | 1987-03-20 | 1987-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3998387U JPS63148657U (en) | 1987-03-20 | 1987-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63148657U true JPS63148657U (en) | 1988-09-30 |
Family
ID=30853661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3998387U Pending JPS63148657U (en) | 1987-03-20 | 1987-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63148657U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013243204A (en) * | 2012-05-18 | 2013-12-05 | Lintec Corp | Holding device and holding method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5923691A (en) * | 1982-07-29 | 1984-02-07 | Sony Corp | Driving circuit of index type color cathode ray tube |
-
1987
- 1987-03-20 JP JP3998387U patent/JPS63148657U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5923691A (en) * | 1982-07-29 | 1984-02-07 | Sony Corp | Driving circuit of index type color cathode ray tube |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013243204A (en) * | 2012-05-18 | 2013-12-05 | Lintec Corp | Holding device and holding method |