JPH0160530U - - Google Patents

Info

Publication number
JPH0160530U
JPH0160530U JP15610987U JP15610987U JPH0160530U JP H0160530 U JPH0160530 U JP H0160530U JP 15610987 U JP15610987 U JP 15610987U JP 15610987 U JP15610987 U JP 15610987U JP H0160530 U JPH0160530 U JP H0160530U
Authority
JP
Japan
Prior art keywords
coating device
resist coating
rotatable stage
resist
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15610987U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15610987U priority Critical patent/JPH0160530U/ja
Publication of JPH0160530U publication Critical patent/JPH0160530U/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例のレジスト塗布装置
に基板を装着した場合の縦断面図、第2図は第1
図のA―A線断面図である。 1…基板、2…回転可能であり真空吸着可能な
ステージ、3…レジスト塗布用ノズル、4…下カ
バー、5…上カバー、6…Oリング、7…固定台
FIG. 1 is a longitudinal cross-sectional view of a resist coating device according to an embodiment of the present invention when a substrate is attached, and FIG.
It is a sectional view taken along the line AA in the figure. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Stage which is rotatable and capable of vacuum suction, 3... Nozzle for resist coating, 4... Lower cover, 5... Upper cover, 6... O-ring, 7... Fixing base.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 外囲器カバーと回転可能なステージとレジスト
噴射ノズルより成るレジスト塗布装置において、
回転可能なステージ部に空気吹き出しノズルを設
けたことを特徴とするレジスト塗布装置。
In a resist coating device consisting of an envelope cover, a rotatable stage, and a resist injection nozzle,
A resist coating device characterized in that a rotatable stage section is provided with an air blowing nozzle.
JP15610987U 1987-10-14 1987-10-14 Pending JPH0160530U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15610987U JPH0160530U (en) 1987-10-14 1987-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15610987U JPH0160530U (en) 1987-10-14 1987-10-14

Publications (1)

Publication Number Publication Date
JPH0160530U true JPH0160530U (en) 1989-04-17

Family

ID=31434343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15610987U Pending JPH0160530U (en) 1987-10-14 1987-10-14

Country Status (1)

Country Link
JP (1) JPH0160530U (en)

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