JPH0160530U - - Google Patents
Info
- Publication number
- JPH0160530U JPH0160530U JP15610987U JP15610987U JPH0160530U JP H0160530 U JPH0160530 U JP H0160530U JP 15610987 U JP15610987 U JP 15610987U JP 15610987 U JP15610987 U JP 15610987U JP H0160530 U JPH0160530 U JP H0160530U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- resist coating
- rotatable stage
- resist
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の一実施例のレジスト塗布装置
に基板を装着した場合の縦断面図、第２図は第１
図のＡ―Ａ線断面図である。
１…基板、２…回転可能であり真空吸着可能な
ステージ、３…レジスト塗布用ノズル、４…下カ
バー、５…上カバー、６…Ｏリング、７…固定台
。
FIG. 1 is a longitudinal cross-sectional view of a resist coating device according to an embodiment of the present invention when a substrate is attached, and FIG.
It is a sectional view taken along the line AA in the figure. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Stage which is rotatable and capable of vacuum suction, 3... Nozzle for resist coating, 4... Lower cover, 5... Upper cover, 6... O-ring, 7... Fixing base.
Claims (1)
噴射ノズルより成るレジスト塗布装置において、
回転可能なステージ部に空気吹き出しノズルを設
けたことを特徴とするレジスト塗布装置。 In a resist coating device consisting of an envelope cover, a rotatable stage, and a resist injection nozzle,
A resist coating device characterized in that a rotatable stage section is provided with an air blowing nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15610987U JPH0160530U (en) | 1987-10-14 | 1987-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15610987U JPH0160530U (en) | 1987-10-14 | 1987-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0160530U true JPH0160530U (en) | 1989-04-17 |
Family
ID=31434343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15610987U Pending JPH0160530U (en) | 1987-10-14 | 1987-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0160530U (en) |
-
1987
- 1987-10-14 JP JP15610987U patent/JPH0160530U/ja active Pending