JPH02114937U - - Google Patents
Info
- Publication number
- JPH02114937U JPH02114937U JP2401089U JP2401089U JPH02114937U JP H02114937 U JPH02114937 U JP H02114937U JP 2401089 U JP2401089 U JP 2401089U JP 2401089 U JP2401089 U JP 2401089U JP H02114937 U JPH02114937 U JP H02114937U
- Authority
- JP
- Japan
- Prior art keywords
- wire
- plate
- hot plate
- type wafer
- wafer baking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図、第２図は本考案実施例の構成を示す平
面図、正面図である。図において、
１：ホツトプレート、２：ワイヤ溝、４：搬送
ワイヤ、５：ウエーハ、ｄ：搬送ワイヤの幅寸法
、Ｄ：ワイヤ溝の開口幅寸法。
1 and 2 are a plan view and a front view showing the structure of an embodiment of the present invention. In the figure, 1: hot plate, 2: wire groove, 4: conveyance wire, 5: wafer, d: width dimension of conveyance wire, D: opening width dimension of wire groove.
Claims (1)
トプレート上に吸着してベーキングするプレート
型ウエーハベーキング装置であり、ホツトプレー
トの上面に搬送ワイヤが入り込むワイヤ溝を開口
したものにおいて、ワイヤ溝の開口幅を搬送ワイ
ヤの幅と殆ど一致する寸法に設定したことを特徴
とするプレート型ウエーハベーキング装置。 This is a plate-type wafer baking device that adsorbs and bakes a wafer mounted on a transfer wire and transferred onto a hot plate, and has a wire groove opened on the top surface of the hot plate into which the transfer wire enters. A plate type wafer baking apparatus characterized in that the dimensions are set to almost match the width of a conveying wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2401089U JPH02114937U (en) | 1989-03-02 | 1989-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2401089U JPH02114937U (en) | 1989-03-02 | 1989-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02114937U true JPH02114937U (en) | 1990-09-14 |
Family
ID=31243491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2401089U Pending JPH02114937U (en) | 1989-03-02 | 1989-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02114937U (en) |
-
1989
- 1989-03-02 JP JP2401089U patent/JPH02114937U/ja active Pending
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