JPH0187266U - - Google Patents
Info
- Publication number
- JPH0187266U JPH0187266U JP1987182518U JP18251887U JPH0187266U JP H0187266 U JPH0187266 U JP H0187266U JP 1987182518 U JP1987182518 U JP 1987182518U JP 18251887 U JP18251887 U JP 18251887U JP H0187266 U JPH0187266 U JP H0187266U
- Authority
- JP
- Japan
- Prior art keywords
- optical semiconductor
- box body
- exhausting
- duct
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の実施例１を示す縦断面図、第
２図は本考案の実施例２を示す縦断面図、第３図
は従来例を示す縦断面図である。
１……光半導体素子、２……ペルチエ素子、３
……ペルチエ冷却フアン、４……光半導体測定治
具、５……Ｎ２ボツクス本体、７……予冷器。
FIG. 1 is a vertical cross-sectional view showing a first embodiment of the present invention, FIG. 2 is a vertical cross-sectional view showing a second embodiment of the present invention, and FIG. 3 is a vertical cross-sectional view showing a conventional example. 1... Optical semiconductor element, 2... Peltier element, 3
... Peltier cooling fan, 4 ... Optical semiconductor measuring jig, 5 ... N2 box body, 7 ... Precooler.
Claims (1)
クスにおいて、Ｎ２ボツクス本体内を排気するダ
クトを装備したことを特徴とするＮ２ボツクス。 An N2 box used for temperature characteristic inspection of optical semiconductor devices, characterized in that it is equipped with a duct for exhausting the inside of the N2 box body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987182518U JPH0187266U (en) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987182518U JPH0187266U (en) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187266U true JPH0187266U (en) | 1989-06-08 |
Family
ID=31473965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987182518U Pending JPH0187266U (en) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187266U (en) |
-
1987
- 1987-11-30 JP JP1987182518U patent/JPH0187266U/ja active Pending