JPH0211326U - - Google Patents
Info
- Publication number
- JPH0211326U JPH0211326U JP8942588U JP8942588U JPH0211326U JP H0211326 U JPH0211326 U JP H0211326U JP 8942588 U JP8942588 U JP 8942588U JP 8942588 U JP8942588 U JP 8942588U JP H0211326 U JPH0211326 U JP H0211326U
- Authority
- JP
- Japan
- Prior art keywords
- carrier holder
- carrier
- chamber
- exhaust port
- nozzle head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000001035 drying Methods 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案の実施例１を示す断面図、第２
図は側面から見た断面図、第３図は本考案による
実施例２を示す断面図である。
１……キヤリアホルダ、２……半導体ウエハ、
３……キヤリア、４……ノズルヘツド、５，１２
……ノズル、６……ガイド、７……チヤンバ、８
……排気口、９……カバー、１０……スライド、
１１……首振り。
Fig. 1 is a sectional view showing the first embodiment of the present invention;
The figure is a sectional view seen from the side, and FIG. 3 is a sectional view showing a second embodiment of the present invention. 1...Carrier holder, 2...Semiconductor wafer,
3...Carrier, 4...Nozzle head, 5,12
...Nozzle, 6...Guide, 7...Chamber, 8
...Exhaust port, 9...Cover, 10...Slide,
11... Shake your head.
Claims (1)
持するキヤリアホルダと、キヤリアホルダに対し
て相対的に移動してキヤリアホルダのウエハにク
リーンエアを吹き付けるノズルヘツドと、前記キ
ヤリアホルダとノズルヘツドを内部に収納し下部
に排気口を有するチヤンバとから構成したことを
特徴とする半導体ウエハの脱水乾燥装置。 A carrier holder that holds a carrier containing a plurality of semiconductor wafers, a nozzle head that moves relative to the carrier holder and blows clean air onto the wafers in the carrier holder, and a lower part that stores the carrier holder and the nozzle head inside. 1. A dehydrating and drying apparatus for semiconductor wafers, comprising: a chamber having an exhaust port; and a chamber having an exhaust port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8942588U JPH0211326U (en) | 1988-07-05 | 1988-07-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8942588U JPH0211326U (en) | 1988-07-05 | 1988-07-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0211326U true JPH0211326U (en) | 1990-01-24 |
Family
ID=31313975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8942588U Pending JPH0211326U (en) | 1988-07-05 | 1988-07-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0211326U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5143217U (en) * | 1974-09-27 | 1976-03-30 |
-
1988
- 1988-07-05 JP JP8942588U patent/JPH0211326U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5143217U (en) * | 1974-09-27 | 1976-03-30 |
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