JPS63178330U - - Google Patents
Info
- Publication number
- JPS63178330U JPS63178330U JP6947987U JP6947987U JPS63178330U JP S63178330 U JPS63178330 U JP S63178330U JP 6947987 U JP6947987 U JP 6947987U JP 6947987 U JP6947987 U JP 6947987U JP S63178330 U JPS63178330 U JP S63178330U
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- suction means
- means disposed
- conveyance section
- pellet suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 9
- 239000011295 pitch Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
Landscapes
- Die Bonding (AREA)
Description
第１図及び第２図は、本考案に係るペレツトマ
ウント装置の一実施例を示す概略構成図である。
第３図は、従来のペレツトマウント装置の概略構
成図、第４図は、コレツトの拡大断面図である。
１１……ペレツトマウント装置、１２……搬送
部、１３……ペレツト吸着手段（真空吸着コレツ
ト）、１４……ホルダー部。
1 and 2 are schematic configuration diagrams showing one embodiment of a pellet mount device according to the present invention.
FIG. 3 is a schematic configuration diagram of a conventional pellet mount device, and FIG. 4 is an enlarged sectional view of a collet. DESCRIPTION OF SYMBOLS 11...Pellet mounting device, 12...Transportation part, 13...Pellet adsorption means (vacuum adsorption collet), 14...Holder part.
Claims (1)
前記搬送部の上方に上下動自在に配設されたペレ
ツト吸着手段と、前記搬送部とペレツト吸着手段
間で、水平なＸ，Ｙ方向に移動可能に設けられ、
多数個のペレツトが貼着されたウエハリングを保
持するホルダー部とを具備したことを特徴とする
ペレツトマウント装置。 a conveying section that feeds the lead frame in fixed pitches;
a pellet suction means disposed above the conveyance section so as to be vertically movable; and a pellet suction means disposed movably in the horizontal X and Y directions between the conveyance section and the pellet suction means;
A pellet mounting device comprising a holder portion for holding a wafer ring to which a large number of pellets are attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6947987U JPS63178330U (en) | 1987-05-08 | 1987-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6947987U JPS63178330U (en) | 1987-05-08 | 1987-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63178330U true JPS63178330U (en) | 1988-11-18 |
Family
ID=30910250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6947987U Pending JPS63178330U (en) | 1987-05-08 | 1987-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63178330U (en) |
-
1987
- 1987-05-08 JP JP6947987U patent/JPS63178330U/ja active Pending
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