JPS6127339U - Semiconductor substrate chuck mechanism - Google Patents
Semiconductor substrate chuck mechanismInfo
- Publication number
- JPS6127339U JPS6127339U JP11190584U JP11190584U JPS6127339U JP S6127339 U JPS6127339 U JP S6127339U JP 11190584 U JP11190584 U JP 11190584U JP 11190584 U JP11190584 U JP 11190584U JP S6127339 U JPS6127339 U JP S6127339U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- chuck mechanism
- substrate chuck
- cradle
- peripheral portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【図面の簡単な説明】
第１図は本考案に係るチャッダ機構の説明図で、同図Ｎ
ぼ側断面図、Ｂは平面図。
第２図は従来のチャック機構の説明図で、同図Ａは側断
面図、Ｂは平面図である。
図において、１はウエハ、２は受け台、３は支持板、４
，７は保持棒、５，１０はテーブル、８は保持具、であ
る。[Brief explanation of the drawings] Figure 1 is an explanatory diagram of the chadda mechanism according to the present invention.
B is a top view. FIG. 2 is an explanatory view of a conventional chuck mechanism, in which A is a side sectional view and B is a plan view. In the figure, 1 is a wafer, 2 is a pedestal, 3 is a support plate, and 4
, 7 are holding rods, 5 and 10 are tables, and 8 is a holder.
Claims (1)
処理室のテーブルに装着する機構が、上下動が可能な保
持棒を下面中央に備えると共に、上方に傾斜した周辺部
をもつ丁字形の断面形状をもって形成されており、該傾
斜した周辺部で基板の縁を保持して装着することを特徴
とする半導体基板のチャック機構。The mechanism for mounting a semiconductor substrate onto a table in the processing chamber mounted on a cradle is equipped with a vertically movable holding rod in the center of the lower surface, and is T-shaped with an upwardly sloping periphery. What is claimed is: 1. A chuck mechanism for a semiconductor substrate, characterized in that the chucking mechanism is formed with a cross-sectional shape of , and is mounted by holding the edge of the substrate at the inclined peripheral portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11190584U JPS6127339U (en) | 1984-07-24 | 1984-07-24 | Semiconductor substrate chuck mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11190584U JPS6127339U (en) | 1984-07-24 | 1984-07-24 | Semiconductor substrate chuck mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6127339U true JPS6127339U (en) | 1986-02-18 |
Family
ID=30670976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11190584U Pending JPS6127339U (en) | 1984-07-24 | 1984-07-24 | Semiconductor substrate chuck mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127339U (en) |
-
1984
- 1984-07-24 JP JP11190584U patent/JPS6127339U/en active Pending
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