JPS59100552U - Polishing pressure applying mechanism of double-sided simultaneous polishing machine - Google Patents
Polishing pressure applying mechanism of double-sided simultaneous polishing machineInfo
- Publication number
- JPS59100552U JPS59100552U JP1982195019U JP19501982U JPS59100552U JP S59100552 U JPS59100552 U JP S59100552U JP 1982195019 U JP1982195019 U JP 1982195019U JP 19501982 U JP19501982 U JP 19501982U JP S59100552 U JPS59100552 U JP S59100552U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- double
- applying mechanism
- pressure applying
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の両面同時研磨機の概略を示す断面図、第
２図は下定盤上でのウェハとキャリアの配置を示す平面
図、第３図は研磨初期の上下定盤とウェハとの接触状態
を示す断面図、第４図は本 “考案による研磨圧付加
機構を示す断面図である。
１・・・ベース本体、２・・・下定盤、３・・・上定盤
、４・・・インターナルギヤ、８・・・センターギヤ、
１６・・・ウェハ、１７・・・キャリア、２２・・・支
持体、２５・・・加圧シリンダー、２７・・・上下用シ
リンダー、２９ ゛・・・バランスシリンダー、３２
・・・タンク。Figure 1 is a cross-sectional view schematically showing a conventional double-sided simultaneous polishing machine, Figure 2 is a plan view showing the arrangement of the wafer and carrier on the lower surface plate, and Figure 3 is a diagram showing the arrangement of the wafer and the upper and lower polishing plates at the initial stage of polishing. FIG. 4 is a sectional view showing the polishing pressure applying mechanism devised by this book. 1...Base main body, 2...Lower surface plate, 3...Upper surface plate, 4. ...Internal gear, 8...Center gear,
16... Wafer, 17... Carrier, 22... Support body, 25... Pressure cylinder, 27... Vertical cylinder, 29 ゛... Balance cylinder, 32
···tank.
Claims (1)
磨加工する両面同時研磨機の研磨圧付加機構において、
下定盤に対向する上定盤を球面軸受を介して懸垂支持す
る昇降可能な支持体と、二の支持体に配置され、支持体
が下降端にあるとき、前記上定盤を押さげ、上定盤と下
定盤の間に配置された被加工物に研磨圧を付加する第１
のシリンダと、前記支持体に配置され前記上定盤を常時
上。 昇させる方向に付勢する第２のシリンダと、この第２の
シリンダに結合されたバラストタンクとを設けたことを
特徴とする両面同時研磨機の研磨圧付加機構。[Claim for Utility Model Registration] In a polishing pressure applying mechanism of a double-sided simultaneous polishing machine that simultaneously polishes the front and back surfaces of a thin plate-like workpiece made of a brittle material,
A vertically movable support that suspends and supports an upper surface plate facing the lower surface plate via a spherical bearing, and a second support that presses down the upper surface plate when the support is at the lower end, The first part applies polishing pressure to the workpiece placed between the surface plate and the lower surface plate.
a cylinder disposed on the support and with the upper surface plate always on top. 1. A polishing pressure applying mechanism for a double-sided simultaneous polishing machine, comprising: a second cylinder biased in a lifting direction; and a ballast tank coupled to the second cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982195019U JPS59100552U (en) | 1982-12-24 | 1982-12-24 | Polishing pressure applying mechanism of double-sided simultaneous polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982195019U JPS59100552U (en) | 1982-12-24 | 1982-12-24 | Polishing pressure applying mechanism of double-sided simultaneous polishing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59100552U true JPS59100552U (en) | 1984-07-06 |
Family
ID=30418990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982195019U Pending JPS59100552U (en) | 1982-12-24 | 1982-12-24 | Polishing pressure applying mechanism of double-sided simultaneous polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59100552U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0263958U (en) * | 1988-11-02 | 1990-05-14 |
-
1982
- 1982-12-24 JP JP1982195019U patent/JPS59100552U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0263958U (en) * | 1988-11-02 | 1990-05-14 |
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