JPS61186235U - - Google Patents
Info
- Publication number
- JPS61186235U JPS61186235U JP6919485U JP6919485U JPS61186235U JP S61186235 U JPS61186235 U JP S61186235U JP 6919485 U JP6919485 U JP 6919485U JP 6919485 U JP6919485 U JP 6919485U JP S61186235 U JPS61186235 U JP S61186235U
- Authority
- JP
- Japan
- Prior art keywords
- section
- stage
- collect
- wafer
- mount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Die Bonding (AREA)
Description
第1図は本考案のマウント装置の一実施例を示
すフオトカプラー用マウント装置の平面図、第2
図a,b,cはマウント順序を表わす図である。
1……LEDウエハース、2……フオトトラン
ジスタウエハース、3……第1のX―Yステージ
、4……LEDペレツト吸着用コレツト、5……
フオトトランジスターペレツト吸着用コレツト、
6……コレツトホルダー部、7……マウントヘツ
ド部、8……第2のX―Yステージ、9……ペレ
ツト吸着部、10……ローダー部。
FIG. 1 is a plan view of a photocoupler mounting device showing one embodiment of the mounting device of the present invention, and FIG.
Figures a, b, and c are diagrams showing the mounting order. 1... LED wafer, 2... Photo transistor wafer, 3... First XY stage, 4... LED pellet adsorption collector, 5...
Collection for adsorbing phototransistor pellets,
6... Collet holder section, 7... Mount head section, 8... Second XY stage, 9... Pellet adsorption section, 10... Loader section.
Claims (1)
搭載した第1のX―Yステージと、前記2種類の
ウエハースを第1のX―Yステージ上のペレツト
吸着部に選択供給するウエハース供給部と、前記
2種類のウエハースに合つたコレツトを供給する
コレツトホルダー部と、ウエハースのペレツトを
コレツトにて吸着し、これをリードフレームのマ
ウント部にマウントするマウントヘツド部と、該
マウントヘツド部を、第1のX―Yステージ上の
ペレツト吸着部、リードフレームのマウント部、
コレツトホルダー部へ搬送する第2のX―Yステ
ージとを有することを特徴とするマウント装置。 a first XY stage carrying two types of wafers for direct mounting; a wafer supply section that selectively supplies the two types of wafers to a pellet adsorption section on the first XY stage; a collection holder section that supplies a collect suitable for the wafer; a mount head section that adsorbs wafer pellets with the collect and mounts them on the mount section of the lead frame; - Pellet suction part on Y stage, lead frame mount part,
A mounting device characterized by having a second XY stage for transporting a collect to a holder section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6919485U JPS61186235U (en) | 1985-05-10 | 1985-05-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6919485U JPS61186235U (en) | 1985-05-10 | 1985-05-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61186235U true JPS61186235U (en) | 1986-11-20 |
Family
ID=30604636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6919485U Pending JPS61186235U (en) | 1985-05-10 | 1985-05-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61186235U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5128757A (en) * | 1974-09-04 | 1976-03-11 | Hitachi Ltd | PERETSUTO BONDEINGUSOCHI |
JPS59210647A (en) * | 1983-05-14 | 1984-11-29 | Matsushita Electric Ind Co Ltd | Pellet bonding device |
-
1985
- 1985-05-10 JP JP6919485U patent/JPS61186235U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5128757A (en) * | 1974-09-04 | 1976-03-11 | Hitachi Ltd | PERETSUTO BONDEINGUSOCHI |
JPS59210647A (en) * | 1983-05-14 | 1984-11-29 | Matsushita Electric Ind Co Ltd | Pellet bonding device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5845360U (en) | Substrate attachment/detachment device | |
JPS61186235U (en) | ||
JPS62118443U (en) | ||
JPS6210440U (en) | ||
JPS6153933U (en) | ||
JPS63178330U (en) | ||
JPS59169044U (en) | Semiconductor chip adsorption nozzle | |
JPS6373930U (en) | ||
JPS6183038U (en) | ||
JPS60927U (en) | Semiconductor wafer pasting equipment | |
JPH044745U (en) | ||
JPS58114042U (en) | Silicon wafer cleaning equipment | |
JPS6273544U (en) | ||
JPH044757U (en) | ||
JPS6260029U (en) | ||
JPS6052192U (en) | Device that equips bicycles with solar cells | |
JPS63128732U (en) | ||
JPS6351438U (en) | ||
JPH0171445U (en) | ||
JPH01165645U (en) | ||
JPS61191826U (en) | ||
JPS61117255U (en) | ||
JPS59117145U (en) | Collection for transporting semiconductor chips | |
JPS6038513U (en) | Vegetable transplanter seedling feeding device | |
JPH0312430U (en) |