JPS59136615U - IC inspection microscope - Google Patents
IC inspection microscopeInfo
- Publication number
- JPS59136615U JPS59136615U JP2814883U JP2814883U JPS59136615U JP S59136615 U JPS59136615 U JP S59136615U JP 2814883 U JP2814883 U JP 2814883U JP 2814883 U JP2814883 U JP 2814883U JP S59136615 U JPS59136615 U JP S59136615U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- inspection microscope
- optical system
- vertical direction
- system section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microscoopes, Condenser (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のＩＣ検査顕微鏡の斜視図。第２図は本考
案の概念を示す説明図。第３図は本考案の１実施例の斜
視図。第４図はウェハステージの回動機構を示す斜視図
。第５図は真空チャックの説明図。第６図はウェハステ
ージの位置決めのための把手の説明図。第７図は他の実
施例であって自動ウェハ検査機に応用した場合の説明図
である。
１・・・・・・ウェハ、２０・・・・・・ウェハステー
ジ、２１・・・・・・真空チャック部分、３０・・・・
・・光学系部、４０・・・・・・本考案の１実施例の装
置、４２・・・・・・窓、４３・・・・・・窓、４４・
・・・・・光学系部３０′の取付座、４５・・・・・・
把手、５０・・・・・・キャリージ、５２・・・・・・
モータ、５３・・・・・・キャリーシュニット、７０・
・・・・・本考案の他の実施例の概要。 −
３６３Ｊ３夛
°ゝ−８
３
「−一−−オート４１
／
５
Ｆ＝ や６ヨFIG. 1 is a perspective view of a conventional IC inspection microscope. FIG. 2 is an explanatory diagram showing the concept of the present invention. FIG. 3 is a perspective view of one embodiment of the present invention. FIG. 4 is a perspective view showing the rotation mechanism of the wafer stage. FIG. 5 is an explanatory diagram of the vacuum chuck. FIG. 6 is an explanatory diagram of a handle for positioning the wafer stage. FIG. 7 is another embodiment and is an explanatory diagram when applied to an automatic wafer inspection machine. 1...Wafer, 20...Wafer stage, 21...Vacuum chuck part, 30...
...Optical system section, 40...Device of one embodiment of the present invention, 42...Window, 43...Window, 44...
...Mounting seat of optical system section 30', 45...
Handle, 50... Carriage, 52...
Motor, 53... Carry Schnitt, 70.
...Summary of other embodiments of the present invention. -363J3夛°ゝ-8 3 ``-1--Auto 41/5 F= Ya 6yo
Claims (2)
する光学系部を有するＩＣ検査顕微鏡において、試料を
試料台に吸着する真空チャックと、該試料台を本体基台
に鉛直方向に廻動する機構と、試料と光学系部との距離
ならびに観察範囲の調整機構とを有し、鉛直方向に廻動
した試料表面を光学系部により観察するようにしたこと
を特徴とするＩＣ検査顕微鏡。(1) In an IC inspection microscope that has a sample stand for placing a sample on the main body and an optical system section for observing the surface of the sample, a vacuum chuck that sucks the sample to the sample stand and a vertical direction of the sample stand to the main body base. An IC characterized in that it has a mechanism for rotating in the vertical direction, and a mechanism for adjusting the distance between the sample and the optical system section and the observation range, so that the surface of the sample rotated in the vertical direction can be observed by the optical system section. Inspection microscope.
求の範囲第１項記載のＩＣ検査顕微鏡。(2) The IC inspection microscope according to claim 1, wherein the sample is a semiconductor substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2814883U JPS59136615U (en) | 1983-03-01 | 1983-03-01 | IC inspection microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2814883U JPS59136615U (en) | 1983-03-01 | 1983-03-01 | IC inspection microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59136615U true JPS59136615U (en) | 1984-09-12 |
Family
ID=30159023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2814883U Pending JPS59136615U (en) | 1983-03-01 | 1983-03-01 | IC inspection microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59136615U (en) |
-
1983
- 1983-03-01 JP JP2814883U patent/JPS59136615U/en active Pending
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