JPH01165646U - - Google Patents
Info
- Publication number
- JPH01165646U JPH01165646U JP6121088U JP6121088U JPH01165646U JP H01165646 U JPH01165646 U JP H01165646U JP 6121088 U JP6121088 U JP 6121088U JP 6121088 U JP6121088 U JP 6121088U JP H01165646 U JPH01165646 U JP H01165646U
- Authority
- JP
- Japan
- Prior art keywords
- facet
- wafer
- main body
- aligner
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 7
Description
第１図はこの考案の一実施例を示す正面図、第
２図はその側面図、第３図はその要部正面図、第
４図はこの考案の他の実施例を示す要部正面図、
第５図は従来装置の正面図、第６図はその側面図
、第７図は第５図のローラを示す部分正面図であ
る。図中、１はフアセツトアライナー本体、４は
キヤリアケース、５はウエハ、６はオリエンテー
シヨンフラツト、２１，２２はローラである。な
お、各図中同一符合は同一又は相当部分を示す。
Fig. 1 is a front view showing one embodiment of this invention, Fig. 2 is a side view thereof, Fig. 3 is a front view of main parts thereof, and Fig. 4 is a front view of main parts showing another embodiment of this invention. ,
FIG. 5 is a front view of the conventional device, FIG. 6 is a side view thereof, and FIG. 7 is a partial front view showing the roller of FIG. 5. In the figure, 1 is a face aligner main body, 4 is a carrier case, 5 is a wafer, 6 is an orientation flat, and 21 and 22 are rollers. Note that the same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
ライナー本体に着脱自在に支持され、略垂直状の
ウエハが多数並列されるキヤリアケース、及び上
記フアセツトアライナー本体に回動可能に支承さ
れ、上記ウエハを回動して上記ウエハのフアセツ
トが下方となるよう上記ウエハを位置決めするロ
ーラを備え、上記ウエハが位置決めされたときに
に、上記ウエハが階段状に整列されるよう上記ロ
ーラの上面を傾斜状としたことを特徴とするウエ
ハフアセツトアライナー装置。 A facet aligner main body, a carrier case detachably supported by the facet aligner main body and in which a large number of substantially vertical wafers are arranged side by side, and a carrier case rotatably supported by the facet aligner main body to rotate the wafers. and a roller for positioning the wafer so that the facet of the wafer faces downward, and the upper surface of the roller is sloped so that the wafer is aligned in a stepwise manner when the wafer is positioned. Features of wafer facet aligner equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6121088U JPH01165646U (en) | 1988-05-10 | 1988-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6121088U JPH01165646U (en) | 1988-05-10 | 1988-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165646U true JPH01165646U (en) | 1989-11-20 |
Family
ID=31286886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6121088U Pending JPH01165646U (en) | 1988-05-10 | 1988-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165646U (en) |
-
1988
- 1988-05-10 JP JP6121088U patent/JPH01165646U/ja active Pending