JPS6273532U - - Google Patents
Info
- Publication number
- JPS6273532U JPS6273532U JP16323385U JP16323385U JPS6273532U JP S6273532 U JPS6273532 U JP S6273532U JP 16323385 U JP16323385 U JP 16323385U JP 16323385 U JP16323385 U JP 16323385U JP S6273532 U JPS6273532 U JP S6273532U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- orientation flat
- mark
- orientation
- determining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図は第１図の部分拡大図、第３図は半導体ウエハ
の従来例を示す平面図。
１……半導体ウエハ、２……オリエンテーシヨ
ンフラツト、３……スリツト状目印（表裏判別用
目印）。
Figure 1 is a plan view showing one embodiment of the present invention;
The figure is a partially enlarged view of FIG. 1, and FIG. 3 is a plan view showing a conventional example of a semiconductor wafer. 1...Semiconductor wafer, 2...Orientation flat, 3...Slit-like mark (mark for distinguishing front and back).
Claims (1)
方向性を判別させるオリエンテーシヨンフラツト
の他に該オリエンテーシヨンフラツトとの位置関
係を定めて前記半導体ウエハの表裏を判別させる
表裏判別用の目印とを配設し、更に、前記表裏判
別用の目印は、前記オリエンテーシヨンフラツト
を検出する半導体ウエハ方向決め装置によつて検
出されないように、前記オリエンテーシヨンフラ
ツトと異質な目印により形成してなることを特徴
とする表裏判別用目印付き半導体ウエハ。 In addition to an orientation flat on the side edge of the semiconductor wafer for determining the orientation of the semiconductor wafer, there is also an orientation flat for determining the front and back sides of the semiconductor wafer by determining the positional relationship with the orientation flat. Further, the front-back discrimination mark is provided with a mark different from the orientation flat so that it is not detected by the semiconductor wafer orientation device that detects the orientation flat. A semiconductor wafer with a mark for distinguishing between front and back sides, which is formed by forming a mark.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16323385U JPS6273532U (en) | 1985-10-24 | 1985-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16323385U JPS6273532U (en) | 1985-10-24 | 1985-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273532U true JPS6273532U (en) | 1987-05-11 |
Family
ID=31091243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16323385U Pending JPS6273532U (en) | 1985-10-24 | 1985-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273532U (en) |
-
1985
- 1985-10-24 JP JP16323385U patent/JPS6273532U/ja active Pending
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