JPS6411541U - - Google Patents
Info
- Publication number
- JPS6411541U JPS6411541U JP10503687U JP10503687U JPS6411541U JP S6411541 U JPS6411541 U JP S6411541U JP 10503687 U JP10503687 U JP 10503687U JP 10503687 U JP10503687 U JP 10503687U JP S6411541 U JPS6411541 U JP S6411541U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- positioning jig
- protrusions
- conveyed
- stopping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000001035 drying Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す上面図、第２
図ａ，ｂ及び第３図ａは従来例を示す上面図、第
３ｂ図は従来例を示す断面図である。
２：半導体ウエハ、３：回転ベルト、６：Ｌ字
形治具、７：位置決定治具、８：乾燥プレート。
Fig. 1 is a top view showing one embodiment of the present invention;
Figures a, b and 3a are top views showing the conventional example, and Figure 3b is a sectional view showing the conventional example. 2: Semiconductor wafer, 3: Rotating belt, 6: L-shaped jig, 7: Positioning jig, 8: Drying plate.
Claims (1)
せる位置決定治具において、 半導体ウエハとの接触面は、半導体ウエハの外
周に沿つたわん曲状輪郭を有し、且つ複数個の突
起が形成されてなることを特徴とする位置決定治
具。[Claim for Utility Model Registration] In a positioning jig for stopping a semiconductor wafer being conveyed by a rotating belt, the contact surface with the semiconductor wafer has a curved contour along the outer periphery of the semiconductor wafer, and 1. A positioning jig characterized in that a number of protrusions are formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10503687U JPS6411541U (en) | 1987-07-07 | 1987-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10503687U JPS6411541U (en) | 1987-07-07 | 1987-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6411541U true JPS6411541U (en) | 1989-01-20 |
Family
ID=31337293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10503687U Pending JPS6411541U (en) | 1987-07-07 | 1987-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6411541U (en) |
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1987
- 1987-07-07 JP JP10503687U patent/JPS6411541U/ja active Pending