JPS58148938U - Collets for semiconductor device manufacturing - Google Patents
Collets for semiconductor device manufacturingInfo
- Publication number
- JPS58148938U JPS58148938U JP4632482U JP4632482U JPS58148938U JP S58148938 U JPS58148938 U JP S58148938U JP 4632482 U JP4632482 U JP 4632482U JP 4632482 U JP4632482 U JP 4632482U JP S58148938 U JPS58148938 U JP S58148938U
- Authority
- JP
- Japan
- Prior art keywords
- collets
- semiconductor device
- device manufacturing
- collet
- suctioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は従来のコレットの二側を示す部分断
面図、第３図及び第４図は本考案の一実施例を示す部分
側面図及び底面図、第５図は第４図のコレットの動作時
ρ側面図、第６図及び第７図は本考案の他の各実施例を
示す概略下面図である。
３・・・・・・半導体ペレット、１０・・・・・・コレ
ット、１１．１２，１４，１５．１６．１７・・・・・
・ノズル。1 and 2 are partial cross-sectional views showing two sides of a conventional collet, FIGS. 3 and 4 are partial side views and bottom views showing an embodiment of the present invention, and FIG. 5 is a partial sectional view showing two sides of a conventional collet. Figures 6 and 7 are schematic bottom views showing other embodiments of the present invention. 3... Semiconductor pellet, 10... Collet, 11.12, 14, 15.16.17...
·nozzle.
Claims (1)
とも半導体ペレットを吸着する先端部を各々真空吸引及
び又は排気可能な独立した複数のノズルの集合体で構成
したことを特徴とする半導体装置製造用コレット。A collet for manufacturing semiconductor devices, characterized in that the collet for vacuum suctioning semiconductor pellets is constructed of a plurality of independent nozzles each capable of vacuum suction and/or exhaust, at least at the tip portion for suctioning the semiconductor pellets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4632482U JPS58148938U (en) | 1982-03-30 | 1982-03-30 | Collets for semiconductor device manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4632482U JPS58148938U (en) | 1982-03-30 | 1982-03-30 | Collets for semiconductor device manufacturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58148938U true JPS58148938U (en) | 1983-10-06 |
Family
ID=30057324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4632482U Pending JPS58148938U (en) | 1982-03-30 | 1982-03-30 | Collets for semiconductor device manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58148938U (en) |
-
1982
- 1982-03-30 JP JP4632482U patent/JPS58148938U/en active Pending
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