JPS617037U - Collection for pellet adsorption - Google Patents
Collection for pellet adsorptionInfo
- Publication number
- JPS617037U JPS617037U JP9058284U JP9058284U JPS617037U JP S617037 U JPS617037 U JP S617037U JP 9058284 U JP9058284 U JP 9058284U JP 9058284 U JP9058284 U JP 9058284U JP S617037 U JPS617037 U JP S617037U
- Authority
- JP
- Japan
- Prior art keywords
- collection
- pellet
- adsorption
- pellet adsorption
- collet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は本考案の一実施例を示すコレット先端の斜視図
、第2図は本考案によるコレットによりペレットを吸着
している状態を示す斜視図、第3図aはマウント位置近
傍に突起物を有するステムの斜視図、bはその平面図で
ある。
1・・・ステム、2・・・ステム上の突起部、3・・・
ステム上のマウント位置、4・・・凸部、5・・・ベレ
ット吸着用コレット、6・・・真空吸着用孔、7・・・
ペレット。Fig. 1 is a perspective view of the tip of a collet showing an embodiment of the present invention, Fig. 2 is a perspective view showing a pellet being sucked by the collet of the present invention, and Fig. 3a shows a protrusion near the mount position. FIG. 1B is a perspective view of a stem with b, a plan view thereof. 1... Stem, 2... Protrusion on the stem, 3...
Mount position on stem, 4... Convex portion, 5... Collet for pellet suction, 6... Hole for vacuum suction, 7...
pellet.
Claims (1)
の位置ずれ防止用凸部を有することを特徴とする半導体
素子ペレット吸着用コレット。A collet for adsorbing semiconductor element pellets, characterized in that a part of the adsorption surface of the pellet adsorption collet 1 has a protrusion for preventing the pellet from shifting.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9058284U JPS617037U (en) | 1984-06-18 | 1984-06-18 | Collection for pellet adsorption |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9058284U JPS617037U (en) | 1984-06-18 | 1984-06-18 | Collection for pellet adsorption |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS617037U true JPS617037U (en) | 1986-01-16 |
Family
ID=30645704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9058284U Pending JPS617037U (en) | 1984-06-18 | 1984-06-18 | Collection for pellet adsorption |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS617037U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6386829U (en) * | 1986-11-20 | 1988-06-06 |
-
1984
- 1984-06-18 JP JP9058284U patent/JPS617037U/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6386829U (en) * | 1986-11-20 | 1988-06-06 | ||
JPH0529058Y2 (en) * | 1986-11-20 | 1993-07-26 |
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