JPS5952085U - vacuum equipment - Google Patents
vacuum equipmentInfo
- Publication number
- JPS5952085U JPS5952085U JP14765582U JP14765582U JPS5952085U JP S5952085 U JPS5952085 U JP S5952085U JP 14765582 U JP14765582 U JP 14765582U JP 14765582 U JP14765582 U JP 14765582U JP S5952085 U JPS5952085 U JP S5952085U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum equipment
- gauge
- abstract
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案による真空装置の構成を示す概略図であ
る。
１・・・真空容器、２・・・電離真空計、３・・・真空
遮断器、４・・・真空引き口、５・・・ガス導入口、６
・・・低真空用耐腐蝕性真空計。FIG. 1 is a schematic diagram showing the configuration of a vacuum apparatus according to the present invention. DESCRIPTION OF SYMBOLS 1... Vacuum container, 2... Ionization vacuum gauge, 3... Vacuum circuit breaker, 4... Vacuum outlet, 5... Gas inlet, 6
...Corrosion-resistant vacuum gauge for low vacuum.
Claims (1)
装置において、上記真空容器と上記電離真空計の間に真
空遮断器を備えることを特徴とする真空装置。A vacuum device comprising a vacuum pump, a vacuum container, and a hot cathode ionization vacuum gauge, characterized in that a vacuum circuit breaker is provided between the vacuum container and the ionization vacuum gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14765582U JPS5952085U (en) | 1982-09-28 | 1982-09-28 | vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14765582U JPS5952085U (en) | 1982-09-28 | 1982-09-28 | vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5952085U true JPS5952085U (en) | 1984-04-05 |
Family
ID=30328289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14765582U Pending JPS5952085U (en) | 1982-09-28 | 1982-09-28 | vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5952085U (en) |
-
1982
- 1982-09-28 JP JP14765582U patent/JPS5952085U/en active Pending
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