JPS59196800U - Piping structure of vacuum processing equipment - Google Patents

Piping structure of vacuum processing equipment

Info

Publication number
JPS59196800U
JPS59196800U JP9297483U JP9297483U JPS59196800U JP S59196800 U JPS59196800 U JP S59196800U JP 9297483 U JP9297483 U JP 9297483U JP 9297483 U JP9297483 U JP 9297483U JP S59196800 U JPS59196800 U JP S59196800U
Authority
JP
Japan
Prior art keywords
vacuum processing
piping structure
processing equipment
piping
trap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9297483U
Other languages
Japanese (ja)
Inventor
栄一 星野
久保　喜美男
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP9297483U priority Critical patent/JPS59196800U/en
Publication of JPS59196800U publication Critical patent/JPS59196800U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は真空処理装置の構成を説明する正面図、また第
２図は本考案に係る配管構造の正面図である。 図において４は被処理基板、７はブスタポンプ、８は回
転ポンプ、１０は配管、１１は垂直部配管、１２はフィ
ルタ、１３はトラップ。FIG. 1 is a front view illustrating the configuration of a vacuum processing apparatus, and FIG. 2 is a front view of a piping structure according to the present invention. In the figure, 4 is a substrate to be processed, 7 is a booster pump, 8 is a rotary pump, 10 is a pipe, 11 is a vertical pipe, 12 is a filter, and 13 is a trap.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電子回路素子の製造に使用される真空処理装置において
、チャンバと排気系とを連結する配管の一部を昇り階段
状の段差を設けて形成すると共に該垂直部の配管にフィ
ルタをまたこの下端にトラップを設けてなることを特徴
とする真空処理装置の配管構造。In a vacuum processing apparatus used for manufacturing electronic circuit elements, a part of the piping connecting the chamber and the exhaust system is formed with an ascending step-like step, and a filter is attached to the vertical part of the piping at the lower end. A piping structure for a vacuum processing device characterized by being provided with a trap.
JP9297483U 1983-06-17 1983-06-17 Piping structure of vacuum processing equipment Pending JPS59196800U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9297483U JPS59196800U (en) 1983-06-17 1983-06-17 Piping structure of vacuum processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9297483U JPS59196800U (en) 1983-06-17 1983-06-17 Piping structure of vacuum processing equipment

Publications (1)

Publication Number Publication Date
JPS59196800U true JPS59196800U (en) 1984-12-27

Family

ID=30223480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9297483U Pending JPS59196800U (en) 1983-06-17 1983-06-17 Piping structure of vacuum processing equipment

Country Status (1)

Country Link
JP (1) JPS59196800U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008098283A (en) * 2006-10-10 2008-04-24 Tokyo Electron Ltd Exhaust system, collection unit and processor using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008098283A (en) * 2006-10-10 2008-04-24 Tokyo Electron Ltd Exhaust system, collection unit and processor using the same

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