JPS59113347U - dip type etching device - Google Patents
dip type etching deviceInfo
- Publication number
- JPS59113347U JPS59113347U JP647183U JP647183U JPS59113347U JP S59113347 U JPS59113347 U JP S59113347U JP 647183 U JP647183 U JP 647183U JP 647183 U JP647183 U JP 647183U JP S59113347 U JPS59113347 U JP S59113347U
- Authority
- JP
- Japan
- Prior art keywords
- etching device
- type etching
- dip type
- dip
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のエツチング装置の構成図、第２図は本考
案によるエツチング装置の構成図である。
尚、図において、１・・・エツチング槽、２・・・エツ
チング槽、３・・・セラミック基板、４・・・エツチン
グトレー、５・・・気泡、６・・・蓋、７・・・０−リ
ング、８・・・真空ポンプ、９・・・排気バルブ、１０
・・・リークバルブ。FIG. 1 is a block diagram of a conventional etching apparatus, and FIG. 2 is a block diagram of an etching apparatus according to the present invention. In the figure, 1... Etching tank, 2... Etching tank, 3... Ceramic substrate, 4... Etching tray, 5... Air bubble, 6... Lid, 7... 0 -Ring, 8... Vacuum pump, 9... Exhaust valve, 10
...Leak valve.
Claims (1)
ガスを排気するための真空ポンプを設置したことを特徴
とするディップ式のエツチング装置。A dip-type etching device characterized by being equipped with a lid for sealing an etching tank and a vacuum pump for exhausting gas inside the etching tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP647183U JPS59113347U (en) | 1983-01-20 | 1983-01-20 | dip type etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP647183U JPS59113347U (en) | 1983-01-20 | 1983-01-20 | dip type etching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59113347U true JPS59113347U (en) | 1984-07-31 |
Family
ID=30138032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP647183U Pending JPS59113347U (en) | 1983-01-20 | 1983-01-20 | dip type etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59113347U (en) |
-
1983
- 1983-01-20 JP JP647183U patent/JPS59113347U/en active Pending
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