JPS59126193U - Vacuum exhaust equipment - Google Patents

Vacuum exhaust equipment

Info

Publication number
JPS59126193U
JPS59126193U JP1991283U JP1991283U JPS59126193U JP S59126193 U JPS59126193 U JP S59126193U JP 1991283 U JP1991283 U JP 1991283U JP 1991283 U JP1991283 U JP 1991283U JP S59126193 U JPS59126193 U JP S59126193U
Authority
JP
Japan
Prior art keywords
vacuum exhaust
exhaust equipment
interposed
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1991283U
Other languages
Japanese (ja)
Other versions
JPH029112Y2 (en
Inventor
順司 高田
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP1991283U priority Critical patent/JPS59126193U/en
Publication of JPS59126193U publication Critical patent/JPS59126193U/en
Application granted granted Critical
Publication of JPH029112Y2 publication Critical patent/JPH029112Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の例、第２図は本考案の例を示すブロック
図である。 １．１′・・・・・・油回転ポンプ、２．　２’・・・
・・・メカニカルブースターポンプ、３．　３’・・・
・・・コンダクタンス可変機構、４．４′・・・・・・
被真空容器、５゜５′・・・・・・ガス導入バルブ、６
．　６’・・・・・・真空計。FIG. 1 is a block diagram showing a conventional example, and FIG. 2 is a block diagram showing an example of the present invention. 1.1'...Oil rotary pump, 2. 2'...
...Mechanical booster pump, 3. 3'...
...Variable conductance mechanism, 4.4'...
Vacuum container, 5゜5'...Gas introduction valve, 6
．． 6'... Vacuum gauge.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] メカニカルブースターポンプと油回転ポンプの間に可変
コンダクタンス機構を介在させたことを特徴とする真空
排気装置。A vacuum pumping device characterized in that a variable conductance mechanism is interposed between a mechanical booster pump and an oil rotary pump.
JP1991283U 1983-02-14 1983-02-14 Vacuum exhaust equipment Granted JPS59126193U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991283U JPS59126193U (en) 1983-02-14 1983-02-14 Vacuum exhaust equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991283U JPS59126193U (en) 1983-02-14 1983-02-14 Vacuum exhaust equipment

Publications (2)

Publication Number Publication Date
JPS59126193U true JPS59126193U (en) 1984-08-24
JPH029112Y2 JPH029112Y2 (en) 1990-03-06

Family

ID=30151050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991283U Granted JPS59126193U (en) 1983-02-14 1983-02-14 Vacuum exhaust equipment

Country Status (1)

Country Link
JP (1) JPS59126193U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140490A (en) * 1988-11-22 1990-05-30 Shibaura Eng Works Co Ltd Pressure control device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140490A (en) * 1988-11-22 1990-05-30 Shibaura Eng Works Co Ltd Pressure control device

Also Published As

Publication number Publication date
JPH029112Y2 (en) 1990-03-06

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