JPS59126193U - Vacuum exhaust equipment - Google Patents
Vacuum exhaust equipmentInfo
- Publication number
- JPS59126193U JPS59126193U JP1991283U JP1991283U JPS59126193U JP S59126193 U JPS59126193 U JP S59126193U JP 1991283 U JP1991283 U JP 1991283U JP 1991283 U JP1991283 U JP 1991283U JP S59126193 U JPS59126193 U JP S59126193U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum exhaust
- exhaust equipment
- interposed
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の例、第2図は本考案の例を示すブロック
図である。
1.1′・・・・・・油回転ポンプ、2. 2’・・・
・・・メカニカルブースターポンプ、3. 3’・・・
・・・コンダクタンス可変機構、4.4′・・・・・・
被真空容器、5゜5′・・・・・・ガス導入バルブ、6
. 6’・・・・・・真空計。FIG. 1 is a block diagram showing a conventional example, and FIG. 2 is a block diagram showing an example of the present invention. 1.1'...Oil rotary pump, 2. 2'...
...Mechanical booster pump, 3. 3'...
...Variable conductance mechanism, 4.4'...
Vacuum container, 5゜5'...Gas introduction valve, 6
.. 6'... Vacuum gauge.
Claims (1)
コンダクタンス機構を介在させたことを特徴とする真空
排気装置。A vacuum pumping device characterized in that a variable conductance mechanism is interposed between a mechanical booster pump and an oil rotary pump.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1991283U JPS59126193U (en) | 1983-02-14 | 1983-02-14 | Vacuum exhaust equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1991283U JPS59126193U (en) | 1983-02-14 | 1983-02-14 | Vacuum exhaust equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59126193U true JPS59126193U (en) | 1984-08-24 |
JPH029112Y2 JPH029112Y2 (en) | 1990-03-06 |
Family
ID=30151050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1991283U Granted JPS59126193U (en) | 1983-02-14 | 1983-02-14 | Vacuum exhaust equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59126193U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02140490A (en) * | 1988-11-22 | 1990-05-30 | Shibaura Eng Works Co Ltd | Pressure control device |
-
1983
- 1983-02-14 JP JP1991283U patent/JPS59126193U/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02140490A (en) * | 1988-11-22 | 1990-05-30 | Shibaura Eng Works Co Ltd | Pressure control device |
Also Published As
Publication number | Publication date |
---|---|
JPH029112Y2 (en) | 1990-03-06 |
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